公开(公告)号：US3847114A

公开(公告)日：1974-11-12

申请号：US25856872

申请日：1972-06-01

Applicant: ISE ELECTRONICS CORP

Inventor： KIYOZUMI K

IPC: H05B33/10 ,  C23C13/12

CPC classification number: H05B33/10

Abstract: An apparatus for manufacturing an electroluminous element provides for alternately or simultaneously depositing a phosphor film upon an electrode film formed on a substrate and injecting ions of an activator together with or without the ions of a coactivator into the vapour deposited phosphor film. The source of the injection ions is an electrically heated source of electrons which heats solid activator material heated source of electrons which heats solid activator material in a reservoir associated therewith to which a gaseous coactivator may be added to react with the vaporized activator.

Abstract translation: 用于制造电子元件的装置提供了在形成在基板上的电极膜上交替地或同时地沉积磷光体膜，并将活化剂的离子与辅助激光器的离子一起注入到蒸镀磷光体膜中。 注入离子的来源是电加热的电子源，其加热固体活化剂材料加热的电子源，其加热与其相关联的储存器中的固体活化剂材料，其中可以加入气体共活化剂以与蒸发的活化剂反应。