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公开(公告)号:US20230072894A1
公开(公告)日:2023-03-09
申请号:US17893251
申请日:2022-08-23
发明人: Tae Whan KIM , Young Jin Kim , Hao Qun An
IPC分类号: H01L45/00 , H01L27/112 , H01L27/24
摘要: Disclosed are a self-healing memory device including a lower electrode; a polymer nanocomposite layer formed on the lower electrode, wherein, when a structural defect occurs, the polymer nanocomposite layer repairs the structural defect and restores a memory function damaged due to the structural defect through a self-healing mechanism characterized by movement of a polymer material and hydrogen bonding; and an upper electrode formed on the polymer nanocomposite layer and a method of manufacturing the self-healing memory device.