公开(公告)号：US20180229888A1

公开(公告)日：2018-08-16

申请号：US15952106

申请日：2018-04-12

申请人： Ideal Vacuum Products LLC

发明人： Tony C Smith ,  Richard D Holets

IPC分类号： B65D21/02

CPC分类号： B65D21/0201 ,  B01L1/02 ,  B01L2200/028 ,  B01L2200/0689 ,  B01L2400/049

摘要： A modular vacuum chamber system provides for tapered surfaces and resilient sealing members, wherein the tapered surfaces are protected from undesired contact with work surfaces, and provide for vacuum-tight engagement of various modules. Modules can include chamber modules, defining shapes for a resultant vacuum chamber. Modules can comprise connecting modules, configured to sealingly engage two chamber modules and form a larger vacuum chamber than either module alone. Modules can comprise wall plate modules, configured to sealingly engage a chamber module and form a surface of a vacuum chamber. Wall plate modules can comprise solid plates, optically transparent plates, and plates accommodating ports for communication between the vacuum chamber and the environment outside the vacuum chamber.