公开(公告)号：US20150033854A1

公开(公告)日：2015-02-05

申请号：US14518355

申请日：2014-10-20

申请人： IlnSighTeCh, LLC

发明人： BIAO ZHANG ,  TAO JU

IPC分类号： G01C19/5712 ,  G01P15/105

CPC分类号： G01P15/105 ,  B81B5/00 ,  B81C1/00357 ,  B81C3/001 ,  B81C2201/0197 ,  B81C2203/038 ,  G01C19/56 ,  G01C19/5712 ,  G01C19/5776 ,  G01P15/125 ,  G01R33/091 ,  G01R33/093 ,  G01R33/098

摘要： A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised plurality of movable portions that are capable of moving in response to angular velocity and a plurality of magnetic sensing mechanisms for measuring movements of the movable portions.