Abstract:
Provided are an apparatus and a method that differently sets the access authority of a user for individual parts of an online document. For every parts of the online document, the user authority is set and the parts are edited only by a user that can access the part. Finally, the parts of the documents are combined as the final document. According to the present invention, the document is divided into parts and the access authority of the user is variously set, which results in maximizing the efficiency of editing the document. The editors of the individual parts inherit the authorities to other people, so that it is very efficient for the cooperative job of a document in the organization having a hierarchy.
Abstract:
A telemetry data retrieval apparatus and method for post-processing are provided. The telemetry data retrieval apparatus may include a retrieval initiating unit to receive an input of a retrieval time, and to calculate a percentage of the retrieval time during an entire retrieval period, a start position calculating unit to calculate a retrieval start position in which data retrieval is started within a stored file, based on the calculated percentage, and a telemetry data retrieval unit to verify a start pattern and a time tag from the calculated retrieval start position, and to retrieve a position of telemetry data in the stored file.
Abstract:
An electrostatic chuck structure according to example embodiments of the present invention may include at least one specific region of a conductor having a thickness relatively smaller than those of other regions, at least one specific region of a dielectric having a thickness relatively larger than those of other regions, or at least one specific region of a conductor having a thickness relatively smaller than those of other regions and at least one specific region of a dielectric having a thickness relatively larger than those of other regions. Therefore, etching rate and CD uniformity can be improved during a semiconductor manufacturing process.