公开(公告)号：US20150145546A1

公开(公告)日：2015-05-28

申请号：US14494597

申请日：2014-09-24

Applicant: Industrial Technology Research Institute

Inventor： Shih-Chun Tseng ,  Ren-Jye Wu ,  Ping-Hsing Yang ,  Li-Duan Tsai ,  Jin-Bao Wu

IPC: G01R1/067 ,  C23C16/26 ,  C23C16/34 ,  G01R31/28

CPC classification number: G01R1/06755 ,  C23C14/0605 ,  C23C14/5846 ,  G01R3/00

Abstract: A coated probe is provided. The probe includes a probe body and a cladding layer. The probe body has a terminal. The cladding layer covers the surface of the terminal of the probe body, wherein the cladding layer includes a carbon nano-material layer, and the carbon nano-material layer includes a carbon nano-material.

Abstract translation: 提供涂层探针。 探针包括探针体和包层。 探头主体有一个端子。 包覆层覆盖探针体的端子的表面，其中，包覆层包括碳纳米材料层，碳纳米材料层包含碳纳米材料。

公开(公告)号：US09970959B2

公开(公告)日：2018-05-15

申请号：US14494597

申请日：2014-09-24

Applicant: Industrial Technology Research Institute

Inventor： Shih-Chun Tseng ,  Ren-Jye Wu ,  Ping-Hsing Yang ,  Li-Duan Tsai ,  Jin-Bao Wu

IPC: G01R3/00 ,  G01R1/067 ,  C23C14/06 ,  C23C14/58

CPC classification number: G01R1/06755 ,  C23C14/0605 ,  C23C14/5846 ,  G01R3/00

Abstract: A coated probe is provided. The probe includes a probe body and a cladding layer. The probe body has a terminal. The cladding layer covers the surface of the terminal of the probe body, wherein the cladding layer includes a carbon nano-material layer, and the carbon nano-material layer includes a carbon nano-material.