公开(公告)号：US20240222498A1

公开(公告)日：2024-07-04

申请号：US18605438

申请日：2024-03-14

Applicant: Infineon Technologies AG

Inventor： Ralf SIEMIENIEC ,  Wolfgang JANTSCHER ,  David KAMMERLANDER

IPC: H01L29/78 ,  H01L29/16 ,  H01L29/66

CPC classification number: H01L29/7813 ,  H01L29/1608 ,  H01L29/66734

Abstract: In an example, for manufacturing a semiconductor device, first dopants are implanted through a first surface section of a first surface of a silicon carbide body. A trench is formed that extends from the first surface into the silicon carbide body. The trench includes a first sidewall surface and an opposite second sidewall surface. A spacer mask is formed. The spacer mask covers at least the first sidewall surface. Second dopants are implanted through a portion of a bottom surface of the trench exposed by the spacer mask. The first dopants and the second dopants have a same conductivity type. The first dopants and the second dopants are activated. The first dopants form a doped top shielding region adjoining the second sidewall surface. The second dopants form a doped buried shielding region adjoining the bottom surface.