公开(公告)号：US20170067859A1

公开(公告)日：2017-03-09

申请号：US15258646

申请日：2016-09-07

Applicant: Infineon Technologies AG

Inventor： Stefan KOLB ,  Alfons DEHE ,  Jochen HUBER ,  Franz JOST ,  Horst THEUSS ,  Juergen WOELLENSTEIN

IPC: G01N29/30 ,  G01N29/14 ,  G01N29/24

CPC classification number: G01N29/30 ,  G01N29/2418 ,  G01N2291/021

Abstract: An apparatus for in-situ calibration of a photoacoustic sensor is provided. The apparatus includes a light emitter to emit light along a transmission path to a gas and an acoustic sensor element configured to detect an acoustic signal emitted from the gas based on the received light. Furthermore, the apparatus includes a sensing unit configured to detect the light transmitted along the transmission path and to provide an output signal, and a calibration unit to receive the output signal from the sensing unit and to provide a calibration information based on the output signal received from the sensing unit.

Abstract translation: 提供了一种用于光声传感器的原位校准的装置。 该装置包括：发光体，沿着沿气体的传输路径发光;以及声传感器元件，被配置为基于接收的光检测从气体发出的声信号。 此外，该装置包括：感测单元，被配置为检测沿着传输路径传输的光并提供输出信号，以及校准单元，用于接收来自感测单元的输出信号，并且基于接收的输出信号提供校准信息 从感测单元。

公开(公告)号：US20210285866A1

公开(公告)日：2021-09-16

申请号：US17336663

申请日：2021-06-02

Applicant: Infineon Technologies AG ,  Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Inventor： Stefan KOLB ,  Alfons DEHE ,  Jochen HUBER ,  Franz JOST ,  Horst THEUSS ,  Wilhelm WIEDMEIER ,  Juergen WOELLENSTEIN

IPC: G01N21/17 ,  G01N29/24 ,  G01N29/02 ,  G01N29/30

Abstract: A gas sensor includes a multi-wafer stack of a plurality of layers and a measurement chamber. The plurality of layers includes a first layer comprising a sensor element that has a microelectromechanical system (MEMS) membrane; and a second layer comprising an emitter element configured to emit electromagnetic radiation. The measurement chamber is interposed between the first layer and the second layer. The measurement chamber is configured to receive a measurement gas and further receive the electromagnetic radiation emitted by the emitter element as the electromagnetic radiation travels along a radiation path from a first end of the measurement chamber to a second end of the measurement chamber that is opposite to the first end.