公开(公告)号：US20230127662A1

公开(公告)日：2023-04-27

申请号：US18047912

申请日：2022-10-19

Applicant: Infineon Technologies AG

Inventor： Stefan Hampl ,  Kerstin Kämmer ,  Olaf Storbeck ,  Ines Uhlig

IPC: H05B3/44

Abstract: An IR (infrared) radiation source includes a sealed cavity structure enclosing a vacuum chamber having a low atmospheric pressure, wherein the sealed cavity structure includes a thermally and electrically insulating material for enclosing the vacuum chamber, heating filaments extending in the vacuum chamber between opposing electrode regions at opposing wall regions of the vacuum chamber, wherein the heating filaments are electrically connected in parallel, and wherein the heating filaments and the electrode regions have a highly electrically conductive material, and an optical isolation structure adjacent to the vacuum chamber for optically confining the IR radiation and providing a predominant propagation direction of the IR radiation.