公开(公告)号：US12196950B2

公开(公告)日：2025-01-14

申请号：US17220149

申请日：2021-04-01

Applicant: Infineon Technologies AG

Inventor： Han Woong Yoo ,  Stephan Gerhard Albert ,  David Brunner ,  Norbert Druml ,  Selma Karic ,  Leonhard Niedermueller ,  Georg Schitter ,  Richard Schroedter

IPC: G02B26/08 ,  G02B26/10

Abstract: A method of Lissajous scanning includes driving a first oscillator structure about a first rotation axis at a first resonance frequency according to a first driving signal, and driving a second oscillator structure about a second rotation axis at a second resonance frequency according to second driving signal different from the first resonance frequency. The first driving signal has a first low level, a first high level, and a first duty cycle, the combination of which produces the first resonance frequency, and the second driving signal has a second low level, a second high level, and a second duty cycle, the combination of which produces the second resonance frequency. At least one of the second low level, the second high level, and the second duty cycle is different from the first low level, the first high level, and the first duty cycle, respectively.