PHOTOACOUSTIC SENSORS AND MEMS DEVICES

    公开(公告)号:US20230116926A1

    公开(公告)日:2023-04-20

    申请号:US18069371

    申请日:2022-12-21

    Abstract: A photoacoustic sensor includes a first MEMS device and a second MEMS device. The first MEMS device includes a first MEMS component including an optical emitter, and a first optically transparent cover wafer-bonded to the first MEMS component, wherein the first MEMS component and the first optically transparent cover form a first closed cavity. The second MEMS device includes a second MEMS component including a pressure detector, and a second optically transparent cover wafer-bonded to the second MEMS component, wherein the second MEMS component and the second optically transparent cover form a second closed cavity.

    ULTRASONIC TOUCH SENSORS AND CAPACITIVE PRESSURE SENSING MICROELECTROMECHANICAL SYSTEM FUSION

    公开(公告)号:US20240094850A1

    公开(公告)日:2024-03-21

    申请号:US18159817

    申请日:2023-01-26

    CPC classification number: G06F3/04186 G06F3/043 G06F3/044 G06F2203/04105

    Abstract: A touch sensor includes a touch structure including a touch interface and an inner interface arranged opposite to the touch interface; a capacitive ultrasonic transmitter arranged inside an enclosed interior volume and configured to transmit an ultrasonic transmit wave towards the touch structure; a capacitive ultrasonic receiver arranged inside the enclosed interior volume and configured to receive at least one ultrasonic reflected wave produced from the ultrasonic transmit wave via internal reflection; a coupling medium that fills an area between the inner interface and the capacitive ultrasonic receiver, wherein an external force applied to the touch interface is configured to impart an internal pressure onto the capacitive ultrasonic receiver through the coupling medium; and a sensor circuit configured to convert the at least one ultrasonic reflected wave into a measurement signal and detect the external force based on the measurement signal.

    ULTRASONIC TRANSDUCER
    4.
    发明公开

    公开(公告)号:US20230315235A1

    公开(公告)日:2023-10-05

    申请号:US18188611

    申请日:2023-03-23

    CPC classification number: G06F3/043 G06F2203/04103

    Abstract: An ultrasonic transducer includes at least one ultrasonic transducer element, a semiconductor chip that includes the ultrasonic transducer element, and a housing. The semiconductor chip is arranged in the housing. The semiconductor chip is embedded in a dimensionally stable encapsulation, wherein a contact surface of the dimensionally stable encapsulation is configured for acoustically coupling the ultrasonic transducer to a casing. Additionally, an ultrasonic transducer system and a method for fitting the ultrasonic transducer or ultrasonic transducer system are provided.

    SENSOR FOR MEASURING A GAS PROPERTY

    公开(公告)号:US20220196585A1

    公开(公告)日:2022-06-23

    申请号:US17457752

    申请日:2021-12-06

    Abstract: It is proposed a sensor for measuring a gas property, wherein the sensor comprises a semiconductor die, wherein the semiconductor die comprises a reference cavity and a measuring cavity, wherein a reference sensor element is arranged in the reference cavity, wherein a measuring sensor element is arranged in the measuring cavity, wherein the reference cavity is sealed from ambient gas, wherein the measuring cavity is fluidly connected to ambient gas. Further it is proposed a method for manufacturing such a sensor.

    METHODS FOR OPERATING THERMAL CONDUCTIVITY SENSORS

    公开(公告)号:US20240393272A1

    公开(公告)日:2024-11-28

    申请号:US18665352

    申请日:2024-05-15

    Abstract: A method for operating a thermal conductivity sensor includes the following steps: (i) applying a supply voltage to a measurement element of the thermal conductivity sensor, wherein the supply voltage results in a temperature increase of the measurement element to a characteristic temperature at which the measurement element is sensitive to a thermal conductivity of an analysis gas, (ii) performing a first measurement by the measurement element during the temperature increase before the measurement element has reached the characteristic temperature, thereby providing a first measurement value, (iii) performing a second measurement by the measurement element at a time when the measurement element has reached the characteristic temperature, thereby providing a second measurement value, and (iv) obtaining a compensated measurement value by compensating an offset of the second measurement value based on the first measurement value.

    GAS CONCENTRATION DETECTION BY MEANS OF THERMOACOUSTIC SOUND WAVE

    公开(公告)号:US20220074897A1

    公开(公告)日:2022-03-10

    申请号:US17446507

    申请日:2021-08-31

    Abstract: A gas sensor having a heater, a receiver, and a space arranged between the heater and the receiver, is described, the heater being configured to generate a thermoacoustic sound wave propagating through the space by using a stimulation signal. The receiver is in this case configured to receive the thermoacoustic sound wave that has propagated through the space and to convert it into a reception signal that has a time-of-flight-dependent shift with respect to the stimulation signal and therefore information relating to the gas concentration in the space.

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