公开(公告)号：US20210055581A1

公开(公告)日：2021-02-25

申请号：US16997363

申请日：2020-08-19

Applicant: InnoLight Technology (Suzhou) LTD.

Inventor： Dongdong YAN ,  Xianyao LI

IPC: G02F1/035 ,  G02F1/225 ,  G02F1/03

Abstract: A silicon-based electro-optic modulator includes a substrate layer, an insulation layer, and an optical waveguide layer stacked sequentially, traveling wave electrodes disposed above the optical waveguide layer, and a metal grating structure periodically configured along the direction in which an electrical signal propagates in the traveling wave electrodes. The metal grating structure is disposed above the optical waveguide layer.

公开(公告)号：US20230296925A1

公开(公告)日：2023-09-21

申请号：US18041452

申请日：2021-08-03

Applicant: InnoLight Technology (Suzhou) LTD.

Inventor： Dongdong YAN ,  Xianyao LI

IPC: G02F1/01

CPC classification number: G02F1/0102 ,  G02F1/011 ,  G02F2201/127

Abstract: A traveling wave electrode modulator and a photonic integrated chip including the same. The traveling wave electrode modulator comprises a silicon base, an optical waveguide and a doped transitional area disposed in the silicon base, and a traveling wave electrode structure electrically connected to the transitional area. The traveling wave electrode structure comprises at least one layer of a continuous electrode continuously extending along the direction of extension of the optical waveguide, at least one layer of a periodic electrode periodically disposed along the direction of extension of the optical waveguide, and a conductive structure. The continuous electrode is electrically connected to the periodic electrode via the conductive structure, and the traveling wave electrode structure is electrically connected to the transitional area via the conductive structure.

公开(公告)号：US20200012163A1

公开(公告)日：2020-01-09

申请号：US16503684

申请日：2019-07-05

Applicant: InnoLight Technology (Suzhou) LTD.

Inventor： Dongdong YAN ,  Xiaoyao LI ,  Zhenzhong WANG

IPC: G02F1/225 ,  G02F1/025 ,  G02F1/035 ,  H05K3/34

Abstract: An optical modulator includes: a bottom substrate layer, having a first surface; a traveling-wave electrode, being disposed on the first surface of the bottom substrate layer and including a plurality of ground electrodes and a plurality of signal electrodes between the ground electrode; an optical waveguide disposed inside the bottom substrate layer; and a shield layer, including a substrate and a metal layer, the substrate covering at least a portion of the traveling-wave electrode and the metal layer being disposed on the surface of the substrate facing away from the traveling-wave electrode. Each of the ground electrodes is electrically connected to the metal layer to provide electromagnetic shielding for the signal electrodes between the ground electrodes.

公开(公告)号：US20210084800A1

公开(公告)日：2021-03-18

申请号：US17016527

申请日：2020-09-10

Applicant: InnoLight Technology (Suzhou) LTD.

Inventor： Dongdong YAN ,  Xianyao LI

IPC: H05K9/00 ,  G02F1/01 ,  G02F1/21

Abstract: An electro-optic modulator includes a base plate, an optical waveguide, at least one set of modulation electrodes, and an electromagnetic shielding structure. The electromagnetic shielding structure includes a top shielding member covering the set of modulation electrodes from above, and a side shielding member disposed on two sides of the set of modulation electrodes. At least a portion of the side shielding member extends into the base plate to isolate the set of modulation electrodes.