公开(公告)号：US20210096025A1

公开(公告)日：2021-04-01

申请号：US16584433

申请日：2019-09-26

申请人： Integrated Device Technology, Inc.

发明人： Dan ALLEN ,  Viresh PATEL

IPC分类号： G01J3/02 ,  G01J3/28

摘要： In some embodiments, a spectrometer is presented. In accordance with some embodiments, the spectrometer includes an optical sensor array, the optical sensor array including a substrate and an array of pixels formed on the substrate; a spectral filter array formed over the pixels of the optical sensor array, the spectral filter array filtering incident light such that each pixel receives light of a spectral transmission profile associated with the pixel; a transparent spacer formed over the spectral filter array; and an opaque mask having input apertures allowing light through the transparent spacer and onto a portion of the spectral filter array. The spectrometer can be formed from the optical sensor array using a combination of photolithographic techniques and bonding of certain layers.