公开(公告)号：US20210096025A1

公开(公告)日：2021-04-01

申请号：US16584433

申请日：2019-09-26

Applicant: Integrated Device Technology, Inc.

Inventor： Dan ALLEN ,  Viresh PATEL

IPC: G01J3/02 ,  G01J3/28

Abstract: In some embodiments, a spectrometer is presented. In accordance with some embodiments, the spectrometer includes an optical sensor array, the optical sensor array including a substrate and an array of pixels formed on the substrate; a spectral filter array formed over the pixels of the optical sensor array, the spectral filter array filtering incident light such that each pixel receives light of a spectral transmission profile associated with the pixel; a transparent spacer formed over the spectral filter array; and an opaque mask having input apertures allowing light through the transparent spacer and onto a portion of the spectral filter array. The spectrometer can be formed from the optical sensor array using a combination of photolithographic techniques and bonding of certain layers.

公开(公告)号：US20180196022A1

公开(公告)日：2018-07-12

申请号：US15405089

申请日：2017-01-12

Applicant: Integrated Device Technology, Inc.

Inventor： Srikanth KULKARNI ,  Viresh PATEL ,  Jitesh SHAH ,  George DELTORO

IPC: G01N33/00

CPC classification number: G01N33/0016 ,  G01N33/0027

Abstract: In accordance with some embodiments of the present invention, a gas sensor system is disclosed. In accordance with some embodiments, a system includes a glass substrate; a heater formed on the glass substrate; and a sensor formed adjacent the heater formed on the glass substrate. A method of forming a gas sensor system according to some embodiments includes providing a glass substrate; forming a heater on the glass substrate; and forming a sensor adjacent the heater on the glass substrate.