公开(公告)号：US20180196022A1

公开(公告)日：2018-07-12

申请号：US15405089

申请日：2017-01-12

Applicant: Integrated Device Technology, Inc.

Inventor： Srikanth KULKARNI ,  Viresh PATEL ,  Jitesh SHAH ,  George DELTORO

IPC: G01N33/00

CPC classification number: G01N33/0016 ,  G01N33/0027

Abstract: In accordance with some embodiments of the present invention, a gas sensor system is disclosed. In accordance with some embodiments, a system includes a glass substrate; a heater formed on the glass substrate; and a sensor formed adjacent the heater formed on the glass substrate. A method of forming a gas sensor system according to some embodiments includes providing a glass substrate; forming a heater on the glass substrate; and forming a sensor adjacent the heater on the glass substrate.