公开(公告)号：US10695907B2

公开(公告)日：2020-06-30

申请号：US15721473

申请日：2017-09-29

Applicant: Intel Corporation

Inventor： Rita Chattopadhyay ,  Mruthunjaya Chetty ,  Jeffrey Davis ,  Stephanie Cope ,  Xiaozhong Ji

IPC: B25J9/16 ,  G01N19/08 ,  G06Q10/06 ,  G05B19/418 ,  G05B23/02

Abstract: Methods, apparatus, systems, and articles of manufacture for monitoring robot health in manufacturing environments are described herein. An example system, to monitor health of a robot in a semiconductor wafer manufacturing facility, includes a sensor coupled to the robot. The sensor is to obtain a vibration signal representative of vibration of the robot. The example system also includes a health monitor extract a feature from the vibration signal, compare the feature to a threshold, and, in response to determining the feature satisfies the threshold, transmit an alert.

公开(公告)号：US20190099886A1

公开(公告)日：2019-04-04

申请号：US15721473

申请日：2017-09-29

Applicant: Intel Corporation

Inventor： Rita Chattopadhyay ,  Mruthunjaya Chetty ,  Jeffrey Davis ,  Stephanie Cope ,  Xiaozhong Ji

IPC: B25J9/16 ,  G01N19/08 ,  G05B19/418 ,  G05B23/02 ,  G06Q10/06

Abstract: Methods, apparatus, systems, and articles of manufacture for monitoring robot health in manufacturing environments are described herein. An example system, to monitor health of a robot in a semiconductor wafer manufacturing facility, includes a sensor coupled to the robot. The sensor is to obtain a vibration signal representative of vibration of the robot. The example system also includes a health monitor extract a feature from the vibration signal, compare the feature to a threshold, and, in response to determining the feature satisfies the threshold, transmit an alert.