公开(公告)号：US11444148B2

公开(公告)日：2022-09-13

申请号：US16222253

申请日：2018-12-17

Applicant: Intel Corporation

Inventor： Gwang-Soo Kim ,  Aaron D. Lilak ,  Kumhyo Byon ,  Doug Ingerly

IPC: H01L49/02 ,  H01F29/14 ,  H01L21/768 ,  H01F27/29 ,  H01F27/28 ,  H01F41/04 ,  H01L27/06

Abstract: An inductor is disclosed. The inductor includes a vertically coiled conductor, a metal contact coupled to a first end of the vertically coiled conductor, and a dielectric material coupled to the metal contact. A tunable high permittivity component is coupled to a second end of the vertically coiled conductor.