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公开(公告)号:US11764219B2
公开(公告)日:2023-09-19
申请号:US16700064
申请日:2019-12-02
Applicant: Intel Corporation
Inventor: Harshitha Vishwanath , Renukprasad Hiremath , Sukru Yemenicioglu , Ranjith Kumar , Ruth Amy Brain
IPC: H01L27/092 , H01L23/522 , H01L23/528 , H01L27/02
CPC classification number: H01L27/0924 , H01L23/5226 , H01L23/5286 , H01L27/0207
Abstract: Embodiments disclosed herein include a semiconductor device. In an embodiment, the semiconductor device comprises a substrate, and a cell on the substrate. In an embodiment, the cell comprises a plurality of transistors over the substrate, and a first metal layer over the plurality of transistors. In an embodiment, the first metal layer comprises a first power line, wherein a width of the first power line is entirely within the cell, a second power line, wherein a width of the second power line is entirely within the cell, and a plurality of signal lines between the first power line and the second power line.