公开(公告)号：US11133461B2

公开(公告)日：2021-09-28

申请号：US14497801

申请日：2014-09-26

Applicant: Intel Corporation

Inventor： Christopher Petz ,  Dale Collins ,  Tsz-Wah Chan ,  Swapnil Lengade ,  Yongjun Hu ,  Allen McTeer

IPC: H01L45/00 ,  H01L21/768 ,  H01L27/24

Abstract: Devices and systems having a diffusion barrier for limiting diffusion of a phase change material including an electrode, a phase change material electrically coupled to the electrode, and a carbon and TiN (C:TiN) diffusion barrier disposed between the electrode and the phase change material to limit diffusion of the phase change material are disclosed and described.