PHOTOMASK ERROR CORRECTION
    1.
    发明申请
    PHOTOMASK ERROR CORRECTION 有权
    照片错误修正

    公开(公告)号:US20150356228A1

    公开(公告)日:2015-12-10

    申请号:US14296705

    申请日:2014-06-05

    CPC classification number: G06F17/5081

    Abstract: Design errors generated employing a mask rule check (MRC) program are indexed and examined one by one by an automated computer program connected to a false error pattern database that contains previously known waivered patterns, a real error pattern database that contains previously known pairs of an error-containing pattern and a corresponding error-free pattern, and optionally a mask house rule database. A waiver is applied to each design error for which a matching pattern is found in the false error pattern database. Each design error for which a match is found in the real error pattern database is modified to substitute an error-free pattern for an error-containing pattern therein. The output of the automated program includes a list of design errors for which no solution is found by the automated program.

    Abstract translation: 使用掩模规则检查(MRC)程序生成的设计错误被索引并通过连接到包含先前已知的丢弃模式的假错误模式数据库的自动计算机程序逐个检查,该伪错误模式数据库包含先前已知的一对 包含错误的模式和相应的无错误模式,以及可选的掩码内容规则数据库。 对于在错误错误模式数据库中找到匹配模式的每个设计错误应用豁免​​。 修改在真实错误模式数据库中找到匹配的每个设计错误,以将无错误模式替换为其中包含错误的模式。 自动化程序的输出包括一个设计错误的列表,为自动程序找不到解决方案。

    Photomask error correction
    2.
    发明授权
    Photomask error correction 有权
    光掩模纠错

    公开(公告)号:US09330225B2

    公开(公告)日:2016-05-03

    申请号:US14296705

    申请日:2014-06-05

    CPC classification number: G06F17/5081

    Abstract: Design errors generated employing a mask rule check (MRC) program are indexed and examined one by one by an automated computer program connected to a false error pattern database that contains previously known waivered patterns, a real error pattern database that contains previously known pairs of an error-containing pattern and a corresponding error-free pattern, and optionally a mask house rule database. A waiver is applied to each design error for which a matching pattern is found in the false error pattern database. Each design error for which a match is found in the real error pattern database is modified to substitute an error-free pattern for an error-containing pattern therein. The output of the automated program includes a list of design errors for which no solution is found by the automated program.

    Abstract translation: 使用掩模规则检查(MRC)程序生成的设计错误被索引并通过连接到包含先前已知的丢弃模式的假错误模式数据库的自动计算机程序逐个检查,该伪错误模式数据库包含先前已知的一对 包含错误的模式和相应的无错误模式,以及可选的掩码内容规则数据库。 对于在错误错误模式数据库中找到匹配模式的每个设计错误应用豁免​​。 修改在真实错误模式数据库中找到匹配的每个设计错误,以将无错误模式替换为其中包含错误的模式。 自动化程序的输出包括一个设计错误的列表,为自动程序找不到解决方案。

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