Multi-chambered, compliant apparatus for restraining workpiece and applying variable pressure thereto during lapping to improve flatness characteristics of workpiece
    1.
    发明申请
    Multi-chambered, compliant apparatus for restraining workpiece and applying variable pressure thereto during lapping to improve flatness characteristics of workpiece 有权
    用于限制工件并在研磨过程中施加可变压力的多室兼容装置,以改善工件的平整度特性

    公开(公告)号:US20040176013A1

    公开(公告)日:2004-09-09

    申请号:US10379497

    申请日:2003-03-04

    CPC classification number: B24B37/16 B24B21/04 B24B37/048 B24B49/16

    Abstract: An apparatus and method of lapping of rows of magnetic recording heads uses multiple fluid-filled ports with variable pressure against a flexible adhesive tape to secure to and support the row. The tape provides the necessary tangential restraining force to drag the workpiece along a lapping plate. The multiple ports beneath the tape provide the necessary normal force to press the workpiece against the lapping plate to allow lapping to occur. The amount of material removal from the row is varied by adjusting the pressure in the ports such that higher pressure is applied to those heads with higher stripe height, and lower pressure is applied to recording heads with lower stripe height. To set or adjust the port. pressures, measurements of the read sensor resistance are taken to calculate the stripe height. The stripe height is roughly proportional to the reciprocal of resistance.

    Abstract translation: 研磨磁记录头的行的装置和方法使用多个流体填充的端口,其可变压力抵靠柔性胶带固定并支撑该行。 胶带提供必要的切向限制力,以沿研磨板拖动工件。 胶带下面的多个端口提供必要的法向力,以将工件压靠在研磨板上以允许研磨发生。 通过调节端口中的压力来改变从行排出的材料的量,使得较高压力施加到具有较高条纹高度的那些头部,并且较低的压力施加到具有较低条纹高度的记录头。 设置或调整端口。 采取压力,读取传感器电阻的测量值来计算条纹高度。 条纹高度大致与电阻倒数成正比。

Patent Agency Ranking