公开(公告)号：US10139358B2

公开(公告)日：2018-11-27

申请号：US14992319

申请日：2016-01-11

申请人： International Business Machines Corporation ,  GlobalFoundries, Inc.

发明人： Lisa F. Edge ,  Gangadhara R. Muthinti ,  Shariq Siddiqui

IPC分类号： G01N21/21 ,  G01N27/02 ,  G01N21/25

摘要： In an embodiment, a method comprises fitting a spectroscopic data of a layer in a layered structure to a dielectric function having a real part and an imaginary part; confirming that the dielectric function is physically possible; based on the dielectric function not being physically possible, repeating the fitting the spectroscopic data, or, based on the dielectric function being physically possible, defining an n degree polynomial to the dielectric function; determining a second derivative and a third derivative of the n degree polynomial; equating the second derivative to a first governing equation and the third derivative to a second governing equation and determining a constant of the first governing equation and the second governing equation; and based on the key governing equations, determining one or more of a band gap, a thickness, and a concentration of the layer.

公开(公告)号：US20170199139A1

公开(公告)日：2017-07-13

申请号：US14992319

申请日：2016-01-11

申请人： International Business Machines Corporation ,  GlobalFoundries, Inc.

发明人： Lisa F. Edge ,  Gangadhara R. Muthinti ,  Shariq Siddiqui

IPC分类号： G01N27/02 ,  G01N21/25

CPC分类号： G01N27/02 ,  G01B11/0625 ,  G01B11/0683 ,  G01N21/211 ,  G01N21/25 ,  G01N21/27 ,  G01N21/8422 ,  G01N21/9501 ,  G01N2021/3568 ,  G01N2021/4126 ,  G01N2201/129

摘要： In an embodiment, a method comprises fitting a spectroscopic data of a layer in a layered structure to a dielectric function having a real part and an imaginary part; confirming that the dielectric function is physically possible; based on the dielectric function not being physically possible, repeating the fitting the spectroscopic data, or, based on the dielectric function being physically possible, defining an n degree polynomial to the dielectric function; determining a second derivative and a third derivative of the n degree polynomial; equating the second derivative to a first governing equation and the third derivative to a second governing equation and determining a constant of the first governing equation and the second governing equation; and based on the key governing equations, determining one or more of a band gap, a thickness, and a concentration of the layer.