-
公开(公告)号:US20140197732A1
公开(公告)日:2014-07-17
申请号:US14096128
申请日:2013-12-04
IPC分类号: H05H1/24
CPC分类号: H05H1/2406 , H05H1/2475 , H05H2001/2412 , H05H2001/4682
摘要: A plasma generating system. A pair of electrodes are spaced apart by an electrode gap. A source of a gas adapted to place the gas in the electrode gap. A power generating circuit is coupled to the electrodes to generate an electric field across the electrodes so as to initiate a plasma discharge within the electrode gap. The power generating circuit has adequate capacity to maintain a sufficient electric field across the gap during the plasma discharge to allow a plasma impedance to self-tune to the plasma generating system. This abstract is not to be considered limiting, since other embodiments may deviate from the features described in this abstract.
摘要翻译: 等离子体发生系统。 一对电极通过电极间隙间隔开。 适于将气体置于电极间隙中的气体源。 功率产生电路耦合到电极以在电极之间产生电场,以便在电极间隙内引发等离子体放电。 功率产生电路具有足够的容量以在等离子体放电期间在间隙上保持足够的电场,以允许等离子体阻抗自调谐到等离子体发生系统。 该摘要不被认为是限制性的,因为其它实施例可能偏离本摘要中描述的特征。
-
公开(公告)号:US09414478B2
公开(公告)日:2016-08-09
申请号:US14096128
申请日:2013-12-04
CPC分类号: H05H1/2406 , H05H1/2475 , H05H2001/2412 , H05H2001/4682
摘要: A plasma generating system. A pair of electrodes are spaced apart by an electrode gap. A source of a gas adapted to place the gas in the electrode gap. A power generating circuit is coupled to the electrodes to generate an electric field across the electrodes so as to initiate a plasma discharge within the electrode gap. The power generating circuit has adequate capacity to maintain a sufficient electric field across the gap during the plasma discharge to allow a plasma impedance to self-tune to the plasma generating system. This abstract is not to be considered limiting, since other embodiments may deviate from the features described in this abstract.
摘要翻译: 等离子体发生系统。 一对电极通过电极间隙间隔开。 适于将气体置于电极间隙中的气体源。 功率产生电路耦合到电极以在电极之间产生电场,以便在电极间隙内引发等离子体放电。 功率产生电路具有足够的容量以在等离子体放电期间在间隙上保持足够的电场,以允许等离子体阻抗自调谐到等离子体发生系统。 该摘要不被认为是限制性的,因为其他实施例可能偏离本摘要中描述的特征。
-