公开(公告)号：US20190226871A1

公开(公告)日：2019-07-25

申请号：US16370664

申请日：2019-03-29

Applicant: InvenSense, Inc.

Inventor： Doruk SENKAL ,  Joseph SEEGER

IPC: G01C25/00 ,  G01C19/5649 ,  G01C19/5776 ,  G01C19/5614 ,  G01C19/5726

Abstract: A method includes receiving a signal from a sensor. The signal includes a first in-phase component and a first quadrature component. The first in-phase and quadrature components are identified. A rate signal is applied to the sensor and the sensor generates a sensed rate signal. A second in-phase and quadrature components associated with the sensed rate signal are determined. A phase error based on the first and the second in-phase components, and the first and the second quadrature components is determined. The method may further include reducing error in measurements associated with the sensor by dynamically compensating for the determined phase error, e.g., by modifying a clock signal, by changing a demodulation phase of a demodulator used to identify the in-phase and the quadrature components.

公开(公告)号：US20190169018A1

公开(公告)日：2019-06-06

申请号：US15985283

申请日：2018-05-21

Applicant: InvenSense, Inc.

Inventor： Doruk SENKAL ,  Yang LIN ,  Houri JOHARI-GALLE ,  Joseph SEEGER

IPC: B81B7/00

Abstract: A device for reducing package stress sensitivity of a sensor includes one or more anchor points for attaching to a substrate; a rigid frame structure configured to at least partially support the sensor; and a compliant element between each anchor point and the rigid frame structure. Also disclosed is a device for supporting a micro-electro-mechanical (MEMS) sensor comprising four anchor points for attaching to a substrate; a rigid frame structure configured to support the MEMS sensor; and a crab-leg suspension element between each anchor point and the rigid frame structure, wherein the crab-leg suspension element is compliant. A method for reducing package stress sensitivity of a sensor is provided as well.