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公开(公告)号：US5879646A
公开(公告)日：1999-03-09
申请号：US771834
申请日：1996-12-23
CPC分类号： B01D53/685
摘要： A waste gas stream containing toxic NF.sub.3 and optionally other gases, such as acidic fluoride gases, for example, HF, SiF.sub.4, MoF.sub.6 and WF.sub.6 is first treated with particles or ribbons of a Cr-containing Fe alloy at about 300.degree.-600.degree. C. to remove the NF.sub.3 content and, if desired, subsequently with an alkaline neutralizing agent in the form of pellets to remove the acidic fluoride contents, if any; said alloy containing preferably about 16-26% Cr and being used in a form of bed packed with said ribbons.
摘要翻译： 含有有毒的NF3和任选的其它气体（如酸性氟化物气体，例如HF，SiF 4，MoF 6和WF 6）的废气流首先在约300-600℃用含Cr的Fe合金的颗粒或带进行处理 如果需要，随后用颗粒形式的碱性中和剂除去NF 3含量，以除去酸性氟化物含量（如果有的话）; 所述合金优选含有约16-26％的Cr，并且以填充有所述带的床的形式使用。
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公开(公告)号：US5906797A
公开(公告)日：1999-05-25
申请号：US37029
申请日：1998-03-09
申请人： Ituo Orihara , Moriyuki Fukushima , Eisaku Mogi , Shiro Yamashita
发明人： Ituo Orihara , Moriyuki Fukushima , Eisaku Mogi , Shiro Yamashita
CPC分类号： B01D53/685
摘要： A waste gas stream containing toxic NF.sub.3 and optionally other gases, such as acidic fluoride gases, for example, HF, SiF.sub.4, MoF.sub.6 and WF.sub.6 is first treated with particles or ribbons of a Cr-containing Fe alloy at about 300-600.degree. C. to remove the NF.sub.3 content and, if desired, subsequently with an alkaline neutralizing agent in the form of pellets to remove the acidic fluoride contents, if any; said alloy containing preferably about 16-26% Cr and being used in a form of bed packed with said ribbons
摘要翻译： 首先用含Cr的Fe合金的颗粒或带在约300-600℃下处理含有有毒的NF 3和任选的其它气体的废气流，例如酸性氟化物气体，例如HF，SiF 4，MoF 6和WF 6。 以除去NF 3的含量，并且如果需要，随后用颗粒形式的碱性中和剂除去酸性氟化物含量（如果有的话） 所述合金优选含有约16-26％的Cr，并且以填充有所述带的床的形式使用
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