公开(公告)号：US5879646A

公开(公告)日：1999-03-09

申请号：US771834

申请日：1996-12-23

申请人： Ithuo Orihara ,  Moriyuki Fukushima ,  Eisaku Mogi ,  Shiro Yamashita

发明人： Ithuo Orihara ,  Moriyuki Fukushima ,  Eisaku Mogi ,  Shiro Yamashita

IPC分类号： A62D3/00 ,  B01D53/34 ,  B01D53/68 ,  B01D53/54

CPC分类号： B01D53/685

摘要： A waste gas stream containing toxic NF.sub.3 and optionally other gases, such as acidic fluoride gases, for example, HF, SiF.sub.4, MoF.sub.6 and WF.sub.6 is first treated with particles or ribbons of a Cr-containing Fe alloy at about 300.degree.-600.degree. C. to remove the NF.sub.3 content and, if desired, subsequently with an alkaline neutralizing agent in the form of pellets to remove the acidic fluoride contents, if any; said alloy containing preferably about 16-26% Cr and being used in a form of bed packed with said ribbons.

摘要翻译： 含有有毒的NF3和任选的其它气体（如酸性氟化物气体，例如HF，SiF 4，MoF 6和WF 6）的废气流首先在约300-600℃用含Cr的Fe合金的颗粒或带进行处理 如果需要，随后用颗粒形式的碱性中和剂除去NF 3含量，以除去酸性氟化物含量（如果有的话）; 所述合金优选含有约16-26％的Cr，并且以填充有所述带的床的形式使用。