公开(公告)号：US06777881B2

公开(公告)日：2004-08-17

申请号：US10292580

申请日：2002-11-13

申请人： Itsuo Yuzurihara ,  Masahiro Kikuchi ,  Toyoaki Suenaga ,  Yoichi Ishikawa

发明人： Itsuo Yuzurihara ,  Masahiro Kikuchi ,  Toyoaki Suenaga ,  Yoichi Ishikawa

IPC分类号： H01J724

CPC分类号： H01J37/32174 ,  H01J37/32082 ,  H02M7/5387 ,  H05H1/46

摘要： A power supply apparatus for generating a plasma for supplying a high-frequency power to a plasma generating device which is a load. The power supply apparatus comprises: a DC power supply; a power conversion circuit which comprises an amplifier circuit of D-class comprising a plurality of switching elements, and which converts a DC power output of the DC power supply to a high-frequency power to output; and a load impedance conversion circuit which converts a load impedance to a predetermined delayed load, wherein the power supply apparatus is adapted to supply the high-frequency power output from the power conversion circuit to a plasma generating device through the load impedance conversion circuit.

摘要翻译： 一种用于产生用于向作为负载的等离子体产生装置提供高频电力的等离子体的电源装置。 电源装置包括：直流电源; 电源转换电路，包括具有多个开关元件的D级的放大电路，并将所述直流电源的直流电力输出转换为高频电力输出; 以及将负载阻抗转换为预定的延迟负载的负载阻抗转换电路，其中，所述电源装置适于通过所述负载阻抗变换电路将从所述电力转换电路输出的高频电力提供给等离子体发生装置。