专利检索 ap:("Jörn Luetzen" OR "Bernhard Sell") AND inv:"Jörn Luetzen" 第 1 页

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发明授权
Integrated circuit configuration having at least one buried circuit element and an insulating layer, and a method of manufacturing the integrated circuit configuration 失效

公开(公告)号：US06541334B2

公开(公告)日：2003-04-01

申请号：US09891188

申请日：2001-06-25

申请人： Jörn Luetzen , Bernhard Sell

发明人： Jörn Luetzen , Bernhard Sell

IPC分类号： H01L218242

CPC分类号： H01L27/10861 , H01L27/1087

摘要： The integrated circuit configuration has at least one buried circuit element and an insulating layer. A multiplicity of insulating regions are in contact with one another to forming a locally delimited insulating layer in the substrate. In this way, trench capacitors implemented as buried circuit elements can be manufactured with a structure size of less than 100 nm in a simple and cost-effective manner.