公开(公告)号：US20040062350A1

公开(公告)日：2004-04-01

申请号：US10672110

申请日：2003-09-26

申请人： JENOPTIK Mikrotechnik GmbH

发明人： Max Christian Schuermann ,  Thomas Missalla ,  Bernd Seher

IPC分类号： G01N023/20

CPC分类号： G01N21/55

摘要： In an arrangement for determining the spectral reflectivity of a measurement object, the object of the invention is to provide a simpler and more compact measuring arrangement, to eliminate the removal of elements from the beam path for detecting the reference beam, which was formally necessary, and to avoid complex translational and rotational movements. Different beam areas proceeding from the radiation source serve as measurement beam and reference beam which are directed simultaneously to different spectrally dispersing areas of at least one dispersive element and to different receiver areas of at least one receiver in a spectrograph. Preferred measurement objects are surfaces which reflect in a spectrally-dependent manner for radiation in the extreme ultraviolet range (EUV), but application of the arrangement is not limited to this spectral region.

摘要翻译： 在用于确定测量对象的光谱反射率的布置中，本发明的目的是提供一种更简单和更紧凑的测量装置，以消除元件从光束路径中的去除，以检测正式需要的参考光束， 并避免复杂的平移和旋转运动。 从辐射源进行的不同的光束区域用作测量光束和参考光束，其同时被引导到至少一个色散元件的不同光谱分散区域和在光谱仪中的至少一个接收器的不同接收器区域。 优选的测量对象是以光谱依赖的方式反映在极紫外范围（EUV）中的辐射的表面，但是该布置的应用不限于该光谱区域。