公开(公告)号：US20040258202A1

公开(公告)日：2004-12-23

申请号：US10463827

申请日：2003-06-17

发明人： Miles N. Wernick ,  Leroy Dean Chapman ,  Oral Oltulu ,  Zhong Zhong

IPC分类号： G01N023/20

CPC分类号： A61B6/483 ,  A61B6/4092 ,  A61B6/502 ,  A61B6/583 ,  G01N23/20

摘要： A method for detecting an image of an object by measuring the intensity at a plurality of positions of a transmitted beam of x-ray radiation emitted from the object as a function of angle within the transmitted beam. The intensity measurements of the transmitted beam are obtained by a crystal analyzer positioned at a plurality of angular positions. The plurality of intensity measurements are used to determine the angular intensity spectrum of the transmitted beam. One or more parameters, such as an attenuation property, a refraction property and a scatter property, can be obtained from the angular intensity spectrum and used to display an image of the object.

摘要翻译： 一种用于通过测量从所述物体发射的x射线辐射的透射束的多个位置处的强度作为所述透射束内的角度的函数来检测物体的图像的方法。 通过位于多个角位置的晶体分析仪获得透射光束的强度测量值。 多个强度测量用于确定透射光束的角强度光谱。 可以从角度强度谱获得一个或多个参数，例如衰减特性，折射特性和散射特性，并用于显示物体的图像。

公开(公告)号：US20040234030A1

公开(公告)日：2004-11-25

申请号：US10731300

申请日：2003-12-08

发明人： Jesse R. Miller ,  Barbara C. Stahly ,  Leonard J. Chyall ,  Igor Ivanisevic ,  Simon Bates

IPC分类号： G01N023/20

CPC分类号： G01N23/20025

摘要： The present invention relates to a method and apparatus for X-ray diffraction analysis. An improved sample holder is provided that includes a curved surface or a plurality of surfaces at different planes. An improved sample holder also has removable individual sample holders.

摘要翻译： 本发明涉及一种用于X射线衍射分析的方法和装置。 提供了一种改进的样品保持器，其包括在不同平面处的曲面或多个表面。 改进的样品架也具有可拆卸的单个样品架。

公开(公告)号：US20040028179A1

公开(公告)日：2004-02-12

申请号：US10410910

申请日：2003-04-10

发明人： Victor W. Rosso ,  Glen Young ,  Joseph Nolfo ,  Imre M. Vitez ,  John J. Venit

IPC分类号： G01N023/20

CPC分类号： G01N1/4077 ,  B01L3/50255 ,  B01L2200/026 ,  B01L2300/0829 ,  B01L2400/049 ,  G01N23/20 ,  G01N23/20025

摘要： Multiple samples are prepared in slurry form and deposited through a funnel plate by a multiprobe liquid handler into an array of inserts situated in openings in a housing. Each insert has a recess that extends through the insert body and a filter disc situated in the recess to support the sample. The filter is held in place by an annular part which defines a channel providing access to the filter through the lower portion of the recess. A pressure differential is created across each of the filters by attaching a vacuum manifold to the bottom of the housing to simultaneously remove the liquid from each of the samples, leaving the samples in powder form. The housing is then placed in the X-ray diffractometer for sequential analysis of each of the samples, while the samples are situated in the inserts.

摘要翻译： 多个样品以浆料形式制备并通过漏斗板通过多孔液体处理器沉积到位于壳体中的开口中的插入物阵列中。 每个插入件具有延伸穿过插入体的凹部和位于凹部中以支撑样品的过滤盘。 过滤器通过环形部分保持在适当位置，该环形部分限定了通过凹部的下部进入过滤器的通道。 通过将真空歧管连接到壳体的底部，同时从每个样品中移除液体，使样品成粉末形式，在每个过滤器上形成压差。 然后将壳体放置在X射线衍射仪中，以顺序分析每个样品，而样品位于插入物中。

公开(公告)号：US20030123610A1

公开(公告)日：2003-07-03

申请号：US10328305

申请日：2002-12-23

申请人： Rigaku Corporation

发明人： Hitoshi Okanda ,  Go Fujinawa

IPC分类号： G01N023/20

CPC分类号： G01N23/20

摘要： X-ray diffraction apparatus is provided in which the focusing method and the parallel beam method can be changed easily for each other. In the measurement with the focusing method, an X-ray beam from an X-ray source passes through an opening of a path-selection slit device and is narrowed by a divergence slit with a predetermined divergence angle and is thereafter incident upon a sample. The changing operation from the focusing method into the parallel beam method is carried out by turning, by 180 degrees, the path-selection slit device around its axis of rotation and by moving the divergence slit in a direction perpendicular to an X-ray traveling direction. Then, the X-ray beam from the X-ray source is reflected by a multilayer mirror to become a parallel beam and passes through the opening of the path-selection slit device and is thereafter incident upon the sample. Thus, the turning of the path-selection slit device enables the change between the focusing method and the parallel beam method, requiring no re-setting operation for the optical system.

摘要翻译： 提供了可以容易地改变聚焦方法和平行光束方法的X射线衍射装置。 在使用聚焦方法的测量中，来自X射线源的X射线束通过路径选择狭缝器件的开口，并且被具有预定发散角的发散狭缝变窄，然后入射到样品上。 通过将路径选择狭缝装置围绕其旋转轴线旋转180度，并且通过沿与X射线行进方向垂直的方向移动发散狭缝来进行从聚焦方法到平行束方法的改变操作 。 然后，来自X射线源的X射线束被多层反射镜反射成平行光束，并通过路径选择狭缝器件的开口，然后入射到样品上。 因此，路径选择狭缝装置的转动能够实现聚焦方式和平行光束方式之间的变化，不需要光学系统的重新设置操作。

公开(公告)号：US20020159560A1

公开(公告)日：2002-10-31

申请号：US09899668

申请日：2001-07-05

发明人： Terrence J. Nienaber ,  William C. Robertson ,  Kent D. Copeland

IPC分类号： G01N023/20

CPC分类号： G01N23/20

摘要： The present invention is directed to a x-y-axis device and a x-y-z-axis device for micro-manipulating or positioning a crystal for x-ray diffraction. More specifically, the devices which may be placed on the head on a goniometer have small footprints (small in size). The sample may be moved and recorded in step resolutions of 1 micron over an extended range of motion.

摘要翻译： 本发明涉及用于微晶操作或定位用于x射线衍射的晶体的x-y轴装置和x-y-z轴装置。 更具体地，可以放置在测角器上的头上的装置具有小的占地面积（尺寸小）。 样品可以在延伸的运动范围内以1微米的分辨率移动和记录。

公开(公告)号：US20020051514A1

公开(公告)日：2002-05-02

申请号：US09908659

申请日：2001-07-18

发明人： Clayton O. Ruud

IPC分类号： G01N023/20

CPC分类号： G01N23/207 ,  G01N23/04 ,  G01N2203/0641

摘要： An apparatus for in-situ measurement of residual surface stresses comprises a compact x-ray tube and a detector. X-rays emitted by the x-ray tube are diffracted from a specimen surface and intercepted by the detector. The intercepted x-rays are converted into light and transferred by a first fiber optic bundle and a second fiber optic bundle to light detection devices. Intensities of the received light are digitized by the light detection devices to generate a first ring and a second ring with common centers. The residual stress in the specimen surface is calculated based on a difference between the radii of the first ring and the second ring.

公开(公告)号：US20040156474A1

公开(公告)日：2004-08-12

申请号：US10364883

申请日：2003-02-12

申请人： JORDAN VALLEY APPLIED RADIATION LTD.

发明人： Boris Yokhin ,  Alexander Dikopoltsev ,  Tzachi Rafaeli ,  Amos Gvirtzman

IPC分类号： G01N023/20

CPC分类号： G01N23/20

摘要： Apparatus for inspection of a sample includes a radiation source and an array of detector elements arranged to receive radiation from the surface due to irradiation of an area of the surface by the radiation source. The array has a first operative configuration for resolving the received radiation along a first axis perpendicular to the surface, and a second operative configuration for resolving the received radiation along a second axis parallel to the surface. A signal processor processes the signal from the detector array in the two configurations so as to determine a reflectance of the surface as a function of elevation angle relative to the surface and a scattering profile of the surface as a function of azimuthal angle in a plane of the surface.

摘要翻译： 用于检查样品的装置包括辐射源和检测器元件的阵列，其布置成由于辐射源对表面的区域的照射而从表面接收辐射。 该阵列具有用于沿着垂直于该表面的第一轴分解接收的辐射的第一操作配置，以及用于沿着平行于该表面的第二轴分解所接收的辐射的第二操作配置。 信号处理器以两种配置处理来自检测器阵列的信号，以便确定作为相对于表面的仰角的函数的表面的反射率和作为方位角的函数的表面的散射曲线作为方位角的函数 表面。

公开(公告)号：US20040131151A1

公开(公告)日：2004-07-08

申请号：US10689314

申请日：2003-10-20

发明人： David Berman ,  Alex Dikopoltsev

IPC分类号： G01N023/20

CPC分类号： G01B15/02 ,  G01N23/20

摘要： A method for inspection of a sample that includes a first layer having a known reflectance property and a second layer formed over the first layer. The method includes directing radiation toward a surface of the sample and sensing the radiation reflected from the surface so as to generate a reflectance signal as a function of elevation angle relative to the surface. A feature due to reflection of the radiation from the first layer is identified in the reflectance signal. The reflectance signal is calibrated responsively to the identified feature and to the known reflectance property of the first layer. The calibrated reflectance signal is analyzed to determine a characteristic of the second layer. Other enhanced inspection methods are disclosed, as well.

摘要翻译： 一种用于检查包括具有已知反射性的第一层和在第一层上形成的第二层的样品的方法。 该方法包括将辐射引导到样品的表面并感测从表面反射的辐射，以产生作为相对于表面的仰角的函数的反射信号。 在反射信号中识别由于来自第一层的辐射的反射的特征。 响应于所识别的特征和第一层的已知反射特性来校准反射信号。 分析校准的反射信号以确定第二层的特性。 还公开了其他增强的检查方法。

公开(公告)号：US20040075055A1

公开(公告)日：2004-04-22

申请号：US10636999

申请日：2003-08-08

发明人： Takeshi Soeda

IPC分类号： G01N023/20

CPC分类号： G01N23/20

摘要： According to the invention, a plurality of points in the HOLZ pattern are substituted for a plurality of Hough transform images by means of the Hough transform, according to an image processing of image data that includes a plurality of pixels obtained by opto/electric converting a HOLZ pattern; clusters of the Hough transform images are extracted; and HOLZ lines are then specified by means of reverse transformation of these clusters. Therefore, HOLZ lines can be specified by means of predetermined calculation steps without an arbitrary HOLZ line specification step being performed by a person performing the measurement. It is thus possible to increase the accuracy with which HOLZ lines are specified.

公开(公告)号：US20040062350A1

公开(公告)日：2004-04-01

申请号：US10672110

申请日：2003-09-26

申请人： JENOPTIK Mikrotechnik GmbH

发明人： Max Christian Schuermann ,  Thomas Missalla ,  Bernd Seher

IPC分类号： G01N023/20

CPC分类号： G01N21/55

摘要： In an arrangement for determining the spectral reflectivity of a measurement object, the object of the invention is to provide a simpler and more compact measuring arrangement, to eliminate the removal of elements from the beam path for detecting the reference beam, which was formally necessary, and to avoid complex translational and rotational movements. Different beam areas proceeding from the radiation source serve as measurement beam and reference beam which are directed simultaneously to different spectrally dispersing areas of at least one dispersive element and to different receiver areas of at least one receiver in a spectrograph. Preferred measurement objects are surfaces which reflect in a spectrally-dependent manner for radiation in the extreme ultraviolet range (EUV), but application of the arrangement is not limited to this spectral region.

摘要翻译： 在用于确定测量对象的光谱反射率的布置中，本发明的目的是提供一种更简单和更紧凑的测量装置，以消除元件从光束路径中的去除，以检测正式需要的参考光束， 并避免复杂的平移和旋转运动。 从辐射源进行的不同的光束区域用作测量光束和参考光束，其同时被引导到至少一个色散元件的不同光谱分散区域和在光谱仪中的至少一个接收器的不同接收器区域。 优选的测量对象是以光谱依赖的方式反映在极紫外范围（EUV）中的辐射的表面，但是该布置的应用不限于该光谱区域。