公开(公告)号：US20220406560A1

公开(公告)日：2022-12-22

申请号：US17844120

申请日：2022-06-20

Applicant: JEOL Ltd.

Inventor： Ryuichi Kusakabe ,  Noriyuki Kobayashi

IPC: H01J37/20

Abstract: There is provided an electron beam inspection system which can enhance the safety of the whole system if servo valves are deactivated in the event of a power failure or an emergency stop. The electron beam inspection system has a beam source, a stage mechanism, and a pump. The stage mechanism has a guide shaft, a slider, a first servo valve, a second servo valve, a first exhaust pipe, a second exhaust pipe, and an exhaust valve. The slider is movably supported to the guide shaft via a hydrostatic bearing and has a first pressure subchamber and a second pressure subchamber. The exhaust valve is mounted in the first exhaust pipe. When the servo valves are in operation, the exhaust valve is opened. When supply of electric power to the servo valves is ceased, the exhaust valve is closed.