MAS Apparatus
    1.
    发明公开
    MAS Apparatus 审中-公开

    公开(公告)号:US20240151789A1

    公开(公告)日:2024-05-09

    申请号:US18387231

    申请日:2023-11-06

    Applicant: JEOL Ltd.

    CPC classification number: G01R33/307 G01R33/31

    Abstract: An angle adjustment mechanism has a block, a projecting piece, and a connection mechanism. The projecting piece is fixed to a stator. The connection mechanism has elongated holes provided in the block and a shaft member provided in the projecting piece. The shaft member is inserted in the elongated holes. During a tilt angle adjustment process, the shaft member is caused to move in a sliding motion in the elongated holes. During a cooling process, the shaft member is also caused to move in a sliding motion in the elongated holes.

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