PLASMA TREATMENT METHOD, METHOD OF PRODUCING PLASMA-TREATED HEXAGONAL BORON NITRIDE POWDER, AND PLASMA TREATMENT DEVICE

    公开(公告)号:US20240182301A1

    公开(公告)日:2024-06-06

    申请号:US18258329

    申请日:2021-09-27

    CPC classification number: C01B21/0648 H05H1/46 C01P2002/76 H05H2242/10

    Abstract: Provided is a hexagonal boron nitride powder that can achieve higher thermal conductivity when added as a filler to resin. A plasma treatment method of plasma-treating a hexagonal boron nitride powder under reduced pressure comprises: storing the hexagonal boron nitride powder in a treatment container; supplying a plasma generating gas into the treatment container and maintaining inside of the treatment container at a pressure lower than atmospheric pressure; applying high frequency waves to an electrode installed outside the treatment container while rotating the treatment container about a central axis of the treatment container as a rotation axis in a state in which the rotation axis of the treatment container is inclined with respect to horizontal, to plasma-treat the hexagonal boron nitride powder in the treatment container; and cooling one or both of the treatment container and the electrode during the plasma treatment.

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