公开(公告)号：US20130108962A1

公开(公告)日：2013-05-02

申请号：US13719264

申请日：2012-12-19

Applicant: JSR Corporation

Inventor： Nobuji Matsumura ,  Daisuke SHIMIZU ,  Toshiyuki KAI

IPC: G03F7/004

CPC classification number: G03F7/004 ,  C07C309/12 ,  C07C381/12 ,  G03F7/0045

Abstract: A radiation-sensitive composition includes a low-molecular-weight compound, a solvent and a radiation-sensitive acid-generator other than the low-molecular-weight compound. The low-molecular-weight compound has one or more acid-dissociable groups which decompose by an action of an acid to enhance solubility in an alkaline developing solution and one or more radiation-sensitive acid-generating groups which generate an acid upon application of an active ray or radiation per molecule. The low-molecular-weight compound has a polystyrene-reduced number-average molecular weight (Mn) measured by gel permeation chromatography (GPC) of 500 to 4,000. The low-molecular-weight compound is not obtained from chain growth polymerization of a monomer with an unsaturated bond. A content of the low-molecular-weight compound is 80 mass % or more of 100 mass % of a total solid component of the radiation-sensitive composition. The low-molecular-weight compound is a compound shown by a following formula (1).

Abstract translation: 辐射敏感性组合物包括除低分子量化合物以外的低分子量化合物，溶剂和辐射敏感性酸产生剂。 低分子量化合物具有一个或多个酸解离基团，其通过酸的作用而分解，以增强在碱性显影溶液中的溶解度，以及一种或多种在施用酸性溶液时产生酸的辐射敏感性产酸基团 活性射线或辐射每分子。 低分子量化合物通过凝胶渗透色谱法（GPC）测定的聚苯乙烯换算的数均分子量（Mn）为500〜4000。 低分子化合物不是由具有不饱和键的单体的链生长聚合获得的。 低分子量化合物的含量为辐射敏感性组合物的总固体成分的100质量％的80质量％以上。 低分子化合物是下述式（1）表示的化合物。