Optical focussing-error detection system
    1.
    发明授权
    Optical focussing-error detection system 失效
    光学聚焦误差检测系统

    公开(公告)号:US4358200A

    公开(公告)日:1982-11-09

    申请号:US109732

    申请日:1980-01-04

    IPC分类号: G02B7/28 G11B7/09 G01J1/36

    CPC分类号: G11B7/0909

    摘要: A focussing error detection system is described for determining deviations between the plane of imaging of an objective system in an optical arrangement and the radiation-reflecting surface in said system. The apparatus comprises an optical element by means of which a radiation beam coming from the radiation reflecting surface is both rendered astigmatic and separated from a radiation beam which is directed to the radiation-reflecting surface. By the use of this element the number of components of the focussing-error detection system can be minimized and a compact construction of said system can be obtained.

    摘要翻译: 描述了一种用于确定光学装置中的物镜系统的成像平面与所述系统中的辐射反射表面之间的偏差的聚焦误差检测系统。 该装置包括光学元件,通过该光学元件来自辐射反射表面的辐射束二者都被散射并与被引导到辐射反射表面的辐射束分离。 通过使用该元件,聚焦误差检测系统的部件数量可以最小化,并且可以获得所述系统的紧凑结构。

    Device for determining the displacement of a machine tool component
    2.
    发明授权
    Device for determining the displacement of a machine tool component 失效
    用于确定机床部件的位移的装置

    公开(公告)号:US3973119A

    公开(公告)日:1976-08-03

    申请号:US556820

    申请日:1975-03-10

    IPC分类号: G01D5/36 G01D5/347 G01B11/04

    CPC分类号: G01D5/34715

    摘要: A device is described for determining the linear displacement of a machine tool component with the aid of a grating which is mechanically connected to the component, which grating is disposed in the light path between a light source and a light-sensitive element which converts the incident light into an electric signal. The light-sensitive element is a multiple photo-cell which consists of a row of line-shaped photo-diodes which by means of an electrical switch are consecutively connected to an electronic circuit which processes the signal which is produced in the photo-diodes.

    摘要翻译: 描述了一种用于通过机械地连接到部件的光栅来确定机床部件的线性位移的装置,该光栅被设置在光源和转换事件的光敏元件之间的光路中 光变成电信号。 感光元件是由一行线形光电二极管组成的多个光电池,其通过电开关连续地连接到处理在光电二极管中产生的信号的电子电路。