公开(公告)号：US4218617A

公开(公告)日：1980-08-19

申请号：US964031

申请日：1978-11-27

Applicant: Jacques Cazaux

Inventor： Jacques Cazaux

IPC: G01N23/227 ,  H01J37/252 ,  H01J39/00

CPC classification number: G01N23/227

Abstract: A process and device for micro-analysis in which a thin layer of anticathode material is scanned by means of a pencil-beam of electrons. The X-rays formed are received by a thin layer of converter where they give rise to a current of photoelectrons which is subject to an intensity measurement by an analyser.From the measurement of intensity of the photoelectrons are deduced the properties of the zone of the anticathode which receives the pencil-beam.

Abstract translation: 用于微分析的方法和装置，其中通过电子束的铅笔束扫描薄层的反阴极材料。 所形成的X射线被转换器的薄层接收，在那里它们产生通过分析仪进行强度测量的光电子的电流。 从光电子的强度的测量推导出接受铅笔束的抗电极的区域的性质。