公开(公告)号：US20130263895A1

公开(公告)日：2013-10-10

申请号：US13441127

申请日：2012-04-06

申请人： Jae Chull Lee ,  Jong Hyuck Lee ,  Jae Min Lee ,  Jung Hun Lee

发明人： Jae Chull Lee ,  Jong Hyuck Lee ,  Jae Min Lee ,  Jung Hun Lee

IPC分类号： B08B9/08

CPC分类号： C23C16/4407

摘要： A portable cleaning system for a CVD reactor. The cleaning system comprises two components: (1) a stand-mounted gloved box assembly for mounting a flow flange or shower head of a CVD reactor thereto, and (2) a gloved device such as a gloved flange or gloved cylinder for mounting to the reactor chamber. Both components can be equipped with a filtration device for capturing particles that are cleaned out of the CVD reactor. Both systems can be purged with an inert gas to guard against pyrophoric reactions. The system can be used for cleaning existing CVD reactors without the need for costly modification of the CVD reactor to accommodate the cleaning equipment. Also, one cleaning system can be used to service several CVD reactors.

摘要翻译： 用于CVD反应器的便携式清洁系统。 清洁系统包括两个部件：（1）用于将CVD反应器的流动凸缘或喷淋头安装到其上的支架式手套箱组件，以及（2）戴手套的装置，例如手套式法兰或手套式气瓶，用于安装到 反应室。 两个组件都可以配备一个过滤装置，用于捕获从CVD反应器中清除的颗粒。 两种系统都可以用惰性气体吹扫，以防止发火反应。 该系统可用于清洁现有的CVD反应器，而不需要昂贵的CVD反应器改造以适应清洁设备。 此外，一个清洁系统可用于维修几个CVD反应堆。