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公开(公告)号：US07973539B1
公开(公告)日：2011-07-05
申请号：US13030015
申请日：2011-02-17
申请人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
发明人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
CPC分类号： G01R27/2641 , G01R27/2694 , G01R35/005
摘要： A method is disclosed for calibrating a capacitance of an apparatus for measuring dielectric properties of a part. The apparatus includes an electrically grounded chamber, a lower electrode disposed within the chamber and connected to a radiofrequency (RF) transmission rod, an electrically grounded upper electrode disposed within the chamber above the lower electrode, and a variable capacitor connected to control transmission of RF power through the RF transmission rod to the lower electrode. A method is also disclosed for determining a capacitance of a part through use of the apparatus. A method is also disclosed for determining a dielectric constant of a part through use of the apparatus. A method is also disclosed for determining a loss tangent of a part through use of the apparatus.
摘要翻译： 公开了一种用于校准用于测量零件的介电特性的装置的电容的方法。 该设备包括电接地室，设置在室内的下电极并连接到射频（RF）传输杆，设置在下电极上方的室内的电接地上电极，以及连接到控制RF 通过RF传输杆向下电极供电。 还公开了一种通过使用该装置来确定零件的电容的方法。 还公开了一种通过使用该装置来确定部件的介电常数的方法。 还公开了一种通过使用该装置来确定零件的损耗角正切的方法。
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公开(公告)号：US20090091341A1
公开(公告)日：2009-04-09
申请号：US12240329
申请日：2008-09-29
申请人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
发明人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
CPC分类号： G01N27/04 , G01R27/2623 , Y10T29/49117
摘要： A plate of substantially uniform thickness is formed from an electrically conductive material. The plate has a top surface defined to support a part to be measured. The plate has a bottom surface defined to be connected to a radiofrequency (RF) transmission rod such that RF power can be transmitted through the RF transmission rod to the plate. The plate is defined to have a number of holes cut vertically through the plate at a corresponding number of locations that underlie embedded conductive material items in the part to be measured when the part is positioned on the top surface of the plate.
摘要翻译： 由导电材料形成厚度基本均匀的板。 该板具有限定为支撑要测量的部分的顶表面。 该板具有限定为连接到射频（RF）传输杆的底表面，使得RF功率可以通过RF传输杆传递到板。 板被限定为当该部件位于板的顶表面上时，在相应数量的位置处垂直地切割许多孔，该位置位于待测量部件中的被测量部件中的嵌入的导电材料物品的位置。
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公开(公告)号：US08519724B2
公开(公告)日：2013-08-27
申请号：US12240329
申请日：2008-09-29
申请人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
发明人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
IPC分类号： G01R27/26
CPC分类号： G01N27/04 , G01R27/2623 , Y10T29/49117
摘要： A plate of substantially uniform thickness is formed from an electrically conductive material. The plate has a top surface defined to support a part to be measured. The plate has a bottom surface defined to be connected to a radiofrequency (RF) transmission rod such that RF power can be transmitted through the RF transmission rod to the plate. The plate is defined to have a number of holes cut vertically through the plate at a corresponding number of locations that underlie embedded conductive material items in the part to be measured when the part is positioned on the top surface of the plate.
摘要翻译： 由导电材料形成厚度基本均匀的板。 该板具有限定为支撑要测量的部分的顶表面。 该板具有限定为连接到射频（RF）传输杆的底表面，使得RF功率可以通过RF传输杆传递到板。 板被限定为当该部件位于板的顶表面上时，在相应数量的位置处垂直地切割许多孔，该位置位于待测量部件中的被测量部件中的嵌入的导电材料物品的位置。
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公开(公告)号：US07911213B2
公开(公告)日：2011-03-22
申请号：US12240375
申请日：2008-09-29
申请人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
发明人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
IPC分类号： G01R27/26
CPC分类号： G01R27/2641 , G01R27/2694 , G01R35/005
摘要： A method is disclosed for calibrating a capacitance of an apparatus for measuring dielectric properties of a part. The apparatus includes an electrically grounded chamber, a lower electrode disposed within the chamber and connected to a radiofrequency (RF) transmission rod, an electrically grounded upper electrode disposed within the chamber above the lower electrode, and a variable capacitor connected to control transmission of RF power through the RF transmission rod to the lower electrode. A method is also disclosed for determining a capacitance of a part through use of the apparatus. A method is also disclosed for determining a dielectric constant of a part through use of the apparatus. A method is also disclosed for determining a loss tangent of a part through use of the apparatus.
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公开(公告)号：US07777500B2
公开(公告)日：2010-08-17
申请号：US12240414
申请日：2008-09-29
申请人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
发明人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
IPC分类号： G01R27/26
CPC分类号： G01N27/04 , G01R27/2623 , Y10T29/49117
摘要： Characterizing dielectric properties of a part includes placing a full-sized part within a dielectric property measurement apparatus. In one embodiment, the full-sized part is a dielectric part of a plasma processing system. The dielectric property measurement apparatus is operated to determine a dielectric constant value of the full-sized part and a loss tangent value of the full-sized part. The determined dielectric constant and loss tangent values are affixed to the full-sized part.
摘要翻译： 表征部件的介电性能包括将全尺寸部件放置在介电性能测量装置内。 在一个实施例中，全尺寸部件是等离子体处理系统的电介质部分。 操作介电性能测量装置以确定全尺寸部件的介电常数值和全尺寸部件的损耗角正切值。 所确定的介电常数和损耗正切值贴在全尺寸的部分上。
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公开(公告)号：US20100079152A1
公开(公告)日：2010-04-01
申请号：US12240375
申请日：2008-09-29
申请人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
发明人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
CPC分类号： G01R27/2641 , G01R27/2694 , G01R35/005
摘要： A method is disclosed for calibrating a capacitance of an apparatus for measuring dielectric properties of a part. The apparatus includes an electrically grounded chamber, a lower electrode disposed within the chamber and connected to a radiofrequency (RF) transmission rod, an electrically grounded upper electrode disposed within the chamber above the lower electrode, and a variable capacitor connected to control transmission of RF power through the RF transmission rod to the lower electrode. A method is also disclosed for determining a capacitance of a part through use of the apparatus. A method is also disclosed for determining a dielectric constant of a part through use of the apparatus. A method is also disclosed for determining a loss tangent of a part through use of the apparatus.
摘要翻译： 公开了一种用于校准用于测量零件的介电特性的装置的电容的方法。 该设备包括电接地室，设置在室内的下电极并连接到射频（RF）传输杆，设置在下电极上方的室内的电接地上电极，以及连接到控制RF 通过RF传输杆向下电极供电。 还公开了一种通过使用该装置来确定零件的电容的方法。 还公开了一种通过使用该装置来确定部件的介电常数的方法。 还公开了一种通过使用该装置来确定零件的损耗角正切的方法。
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公开(公告)号：US08269510B2
公开(公告)日：2012-09-18
申请号：US12240291
申请日：2008-09-29
申请人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
发明人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
IPC分类号： G01R27/26
CPC分类号： G01N27/04 , G01R27/2623 , Y10T29/49117
摘要： A chamber formed from an electrically conductive material is connected to a ground potential. A hot electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation and is physically separated from the chamber. The hot electrode includes a top surface defined to support a part to be measured. A radiofrequency (RF) transmission rod is connected to extend from a bottom surface of the hot electrode through an opening in a bottom of the chamber and be physically separated from the chamber. The RF transmission rod is defined to transmit RF power from a conductor plate in an electrical components housing to the hot electrode. An upper electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation. The upper electrode is electrically connected to the chamber and is defined to be movable in a vertical direction.
摘要翻译： 由导电材料形成的腔室连接到地电位。 由导电材料形成的热电极以大致水平的方向设置在腔室内，并且与腔室物理分离。 热电极包括限定为支撑要测量的部分的顶表面。 射频（RF）传输杆被连接以从热电极的底表面延伸通过腔室的底部中的一个开口，并与腔室物理分离。 RF传输杆被定义为将RF功率从电气部件壳体中的导体板传递到热电极。 由导电材料形成的上电极以大致水平的方向设置在腔室内。 上电极电连接到腔室并被限定为可在垂直方向上移动。
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公开(公告)号：US20110140715A1
公开(公告)日：2011-06-16
申请号：US13030015
申请日：2011-02-17
申请人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
发明人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
IPC分类号： G01R35/00
CPC分类号： G01R27/2641 , G01R27/2694 , G01R35/005
摘要： A method is disclosed for calibrating a capacitance of an apparatus for measuring dielectric properties of a part. The apparatus includes an electrically grounded chamber, a lower electrode disposed within the chamber and connected to a radiofrequency (RF) transmission rod, an electrically grounded upper electrode disposed within the chamber above the lower electrode, and a variable capacitor connected to control transmission of RF power through the RF transmission rod to the lower electrode. A method is also disclosed for determining a capacitance of a part through use of the apparatus. A method is also disclosed for determining a dielectric constant of a part through use of the apparatus. A method is also disclosed for determining a loss tangent of a part through use of the apparatus.
摘要翻译： 公开了一种用于校准用于测量零件的介电特性的装置的电容的方法。 该设备包括电接地室，设置在室内的下电极并连接到射频（RF）传输杆，设置在下电极上方的室内的电接地上电极，以及连接到控制RF 通过RF传输杆向下电极供电。 还公开了一种通过使用该装置来确定零件的电容的方法。 还公开了一种通过使用该装置来确定部件的介电常数的方法。 还公开了一种通过使用该装置来确定零件的损耗角正切的方法。
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公开(公告)号：US20090091340A1
公开(公告)日：2009-04-09
申请号：US12240291
申请日：2008-09-29
申请人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
发明人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
IPC分类号： G01R27/08
CPC分类号： G01N27/04 , G01R27/2623 , Y10T29/49117
摘要： A chamber formed from an electrically conductive material is connected to a ground potential. A hot electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation and is physically separated from the chamber. The hot electrode includes a top surface defined to support a part to be measured. A radiofrequency (RF) transmission rod is connected to extend from a bottom surface of the hot electrode through an opening in a bottom of the chamber and be physically separated from the chamber. The RF transmission rod is defined to transmit RF power from a conductor plate in an electrical components housing to the hot electrode. An upper electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation. The upper electrode is electrically connected to the chamber and is defined to be movable in a vertical direction.
摘要翻译： 由导电材料形成的腔室连接到地电位。 由导电材料形成的热电极以大致水平的方向设置在腔室内，并且与腔室物理分离。 热电极包括限定为支撑要测量的部分的顶表面。 射频（RF）传输杆被连接以从热电极的底表面延伸通过腔室的底部中的一个开口，并与腔室物理分离。 RF传输杆被定义为将RF功率从电气部件壳体中的导体板传递到热电极。 由导电材料形成的上电极以大致水平的方向设置在腔室内。 上电极电连接到腔室并被限定为可在垂直方向上移动。
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公开(公告)号：US20090091335A1
公开(公告)日：2009-04-09
申请号：US12240414
申请日：2008-09-29
申请人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
发明人： Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
IPC分类号： G01R27/26
CPC分类号： G01N27/04 , G01R27/2623 , Y10T29/49117
摘要： Characterizing dielectric properties of a part includes placing a full-sized part within a dielectric property measurement apparatus. In one embodiment, the full-sized part is a dielectric part of a plasma processing system. The dielectric property measurement apparatus is operated to determine a dielectric constant value of the full-sized part and a loss tangent value of the full-sized part. The determined dielectric constant and loss tangent values are affixed to the full-sized part.
摘要翻译： 表征部件的介电性能包括将全尺寸部件放置在介电性能测量装置内。 在一个实施例中，全尺寸部件是等离子体处理系统的电介质部分。 操作介电性能测量装置以确定全尺寸部件的介电常数值和全尺寸部件的损耗角正切值。 所确定的介电常数和损耗正切值贴在全尺寸的部分上。
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