公开(公告)号：US20060029489A1

公开(公告)日：2006-02-09

申请号：US11248375

申请日：2005-10-11

申请人： Jaim Nulman ,  Nissim Sidi

发明人： Jaim Nulman ,  Nissim Sidi

IPC分类号： B65H1/00

CPC分类号： H01L21/67769 ,  H01L21/67028 ,  H01L21/67271 ,  H01L21/68707 ,  Y10S414/139 ,  Y10S414/14

摘要： A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a cassette mover to carry a cassette between the shelves and the docking stations. An interstation transfer apparatus includes a support beam and a transfer arm adapted to carry a cassette between processing stations.

公开(公告)号：US07234908B2

公开(公告)日：2007-06-26

申请号：US11248375

申请日：2005-10-11

申请人： Jaim Nulman ,  Nissim Sidi

发明人： Jaim Nulman ,  Nissim Sidi

IPC分类号： B65G15/58

CPC分类号： H01L21/67769 ,  H01L21/67028 ,  H01L21/67271 ,  H01L21/68707 ,  Y10S414/139 ,  Y10S414/14

摘要： A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a cassette mover to carry a cassette between the shelves and the docking stations. An interstation transfer apparatus includes a support beam and a transfer arm adapted to carry a cassette between processing stations.

摘要翻译： 盒式存储器包括多个相邻于洁净室壁定位并相对于多个盒式对接站垂直设置的盒式存放架，以及盒式移动器，用于在盒架和对接站之间承载盒。 站间传送设备包括支撑梁和适于在处理站之间携带盒的传送臂。

公开(公告)号：US20070237609A1

公开(公告)日：2007-10-11

申请号：US11766093

申请日：2007-06-20

申请人： Jaim Nulman ,  Nissim Sidi

发明人： Jaim Nulman ,  Nissim Sidi

IPC分类号： B65H1/00

CPC分类号： H01L21/67769 ,  H01L21/67028 ,  H01L21/67271 ,  H01L21/68707 ,  Y10S414/139 ,  Y10S414/14

摘要： A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a cassette mover to carry a cassette between the shelves and the docking stations. An interstation transfer apparatus includes a support beam and a transfer arm adapted to carry a cassette between processing stations.

摘要翻译： 盒式存储器包括多个相邻于洁净室壁定位并相对于多个盒式对接站垂直设置的盒式存放架，以及盒式移动器，用于在盒架和对接站之间承载盒。 站间传送设备包括支撑梁和适于在处理站之间携带盒的传送臂。

公开(公告)号：US06506009B1

公开(公告)日：2003-01-14

申请号：US09527092

申请日：2000-03-16

申请人： Jaim Nulman ,  Nissim Sidi

发明人： Jaim Nulman ,  Nissim Sidi

IPC分类号： B65G4907

CPC分类号： H01L21/67769 ,  H01L21/67028 ,  H01L21/67271 ,  H01L21/68707 ,  Y10S414/139 ,  Y10S414/14

摘要： A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a cassette mover to carry a cassette between the shelves and the docking stations. An interstation transfer apparatus includes a support beam and a transfer arm adapted to carry a cassette between processing stations.

公开(公告)号：US06955517B2

公开(公告)日：2005-10-18

申请号：US10263163

申请日：2002-10-02

申请人： Jaim Nulman ,  Nissim Sidi

发明人： Jaim Nulman ,  Nissim Sidi

IPC分类号： B65G1/00 ,  B65G49/07 ,  H01L21/00 ,  H01L21/673 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687 ,  B65G15/58

CPC分类号： H01L21/67769 ,  H01L21/67028 ,  H01L21/67271 ,  H01L21/68707 ,  Y10S414/139 ,  Y10S414/14

摘要： A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a cassette mover to carry a cassette between the shelves and the docking stations. An interstation transfer apparatus includes a support beam and a transfer arm adapted to carry a cassette between processing stations.

摘要翻译： 盒式存储器包括多个相邻于洁净室壁定位并相对于多个盒式对接站垂直设置的盒式存放架，以及盒式移动器，用于在盒架和对接站之间承载盒。 站间传送设备包括支撑梁和适于在处理站之间携带盒的传送臂。