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公开(公告)号：US08783463B2
公开(公告)日：2014-07-22
申请号：US12922408
申请日：2009-03-13
IPC分类号： B65D85/00
CPC分类号： H01L21/67393
摘要： A wafer container utilizes a rigid polymer tubular tower with slots and a “getter” therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes a purge grommet at the base of the container and may have a check valve therein to control the flow direction of gas (including air) into and out of the container and with respect to the tower. The tower is sealingly connected with the grommet. The tower may have a getter media piece rolled in an elongate circular fashion forming or shaped as a tube and disposed within the tower and may have axially extending. The media can provide active and/or passive filtration as well as having capabilities to be recharged. Front opening wafer containers for 300 mm sized wafers generally have a pair of recesses on each of the left and right side in the inside rear of the container portions. These recesses are preferably utilized for elongate towers, such towers extending substantially from a bottom wafer position to a top wafer position. In alternative embodiment, a tubular shape of getter material is exposed within the front opening container without containment of the getter other than at the ends. The tubular getter form is preferably supported at discrete locations to maximize exposure to the internal container environment. A blocker member can selectively close the apertures. An elastomeric cap can facilitate securement of the tubular component in the container portion.
摘要翻译： 晶片容器利用具有槽的刚性聚合物管状塔和其中的“吸气剂”，用于吸收和过滤晶片容器内的水分和蒸气。 塔优选在容器的底部使用吹扫索环，并且可以在其中具有止回阀以控制进入和离开容器的气体（包括空气）的流动方向并相对于塔。 塔与护环密封连接。 塔可以具有以细长的圆形方式卷绕的吸气剂介质片，其形成或成形为管，并且设置在塔内并且可以具有轴向延伸。 介质可以提供主动和/或无源过滤以及具有再充电能力。 用于300mm尺寸晶片的前开口晶片容器通常在容器部分的内侧后部的左侧和右侧各具有一对凹部。 这些凹槽优选地用于细长塔，这种塔基本上从底部晶片位置延伸到顶部晶片位置。 在替代实施例中，吸气剂材料的管状形状暴露在前开口容器内，而不会吸收除了末端之外的吸气剂。 管状吸气剂形式优选地在离散位置处被支撑以最大程度地暴露于内部容器环境。 阻挡件可以选择性地封闭孔。 弹性帽可有助于管状部件固定在容器部分中。
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公开(公告)号：US07900776B2
公开(公告)日：2011-03-08
申请号：US11514796
申请日：2006-09-01
IPC分类号： B65D85/00
CPC分类号： H01L21/67353 , B65D51/26 , B65D2251/04 , H01L21/67369 , H01L21/67373 , H01L21/67383
摘要： A container for holding a wafer includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame. A door is sealingly engagable in the door frame to close the open front. The container further includes wafer restraint means in the enclosure including fixed wafer restraint means and operable wafer restraint means. The operable wafer restraint means is selectively positionable by engaging and disengaging the door from the door frame, and is positioned so to enable insertion or removal of a wafer from the container when the door is disengaged from the door frame and positioned so as to cooperate with the fixed wafer restraint means to restrain the wafer in the container when the door is engaged in the door frame.
摘要翻译： 用于保持晶片的容器包括具有顶部，底部，一对相对侧的外壳部分，由门框限定的后部和相对的开放前部。 门在门框内密封接合，以封闭开放的前部。 容器还包括在外壳中的晶片限制装置，其包括固定的晶片限制装置和可操作的晶片约束装置。 可操作的晶片约束装置通过使门与门框架接合和分离而被选择性地定位，并且被定位成当门从门框架脱离时被定位成使得能够从容器插入或移除晶片，以便与 所述固定晶片限制装置用于当门接合在门框中时将晶片限制在容器中。
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公开(公告)号：US07100772B2
公开(公告)日：2006-09-05
申请号：US10989232
申请日：2004-11-15
IPC分类号： B65D85/90
CPC分类号： H01L21/67353 , B65D51/26 , B65D2251/04 , H01L21/67369 , H01L21/67373 , H01L21/67383
摘要： A container for holding a wafer includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame. A door is sealingly engagable in the door frame to close the open front. The container further includes wafer restraint means in the enclosure including fixed wafer restraint means and operable wafer restraint means. The operable wafer restraint means is selectively positionable by engaging and disengaging the door from the door frame, and is positioned so to enable insertion or removal of a wafer from the container when the door is disengaged from the door frame and positioned so as to cooperate with the fixed wafer restraint means to restrain the wafer in the container when the door is engaged in the door frame.
摘要翻译： 用于保持晶片的容器包括具有顶部，底部，一对相对侧的外壳部分，由门框限定的后部和相对的开放前部。 门在门框内密封接合，以封闭开放的前部。 容器还包括在外壳中的晶片限制装置，其包括固定的晶片限制装置和可操作的晶片约束装置。 可操作的晶片约束装置通过使门与门框架接合和分离而被选择性地定位，并且被定位成当门从门框架脱离时被定位成使得能够从容器插入或移除晶片，以便与 所述固定晶片限制装置用于当门接合在门框中时将晶片限制在容器中。
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公开(公告)号：USD611437S1
公开(公告)日：2010-03-09
申请号：US29305320
申请日：2008-03-18
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公开(公告)号：US07523830B2
公开(公告)日：2009-04-28
申请号：US11284795
申请日：2005-11-22
IPC分类号： B55D85/00
CPC分类号： H01L21/67369
摘要： A wafer container providing improved wafer restraint during physical shock events. In embodiments of the invention, a secondary wafer restraint structure defining a plurality of notches is interposed between opposing wafer restraint members on the door of the container. The notches may be defined by one or more converging edges or surfaces meeting at a junction. The junctions are positioned so as to align with the wafer receiving portions of each opposing pair of wafer restraint member so that when the door is fully sealingly engaged with the enclosure of the container, the edge of the wafer is contacting the junction. In this position, any vertical movement of the wafer due to shock imparted to the container causes the wafer to contact the converging surfaces or edges, thereby limiting such movement. The positioning of the secondary wafer restraint structure between and proximate opposing fingers of the primary wafer restraint limits deflection of the wafer between support points and thereby further inhibits the wafer from “jumping” out of the supports and cross-slotting.
摘要翻译： 在物理冲击事件期间提供改善的晶片约束的晶片容器。 在本发明的实施例中，限定多个凹口的次晶片约束结构插入在容器的门上的相对的晶片约束部件之间。 切口可由一个或多个在会合处的会聚边缘或表面限定。 接合部被定位成与每个相对的一对晶片约束部件的晶片接收部分对准，使得当门与容器的外壳完全密封地接合时，晶片的边缘与接合部接触。 在这个位置上，由于施加到容器上的冲击而导致的晶片的任何垂直移动导致晶片接触会聚表面或边缘，从而限制了这种移动。 第二晶片限制结构在主晶片限制器的相对的指状物之间和之间的定位限制了晶片在支撑点之间的偏转，从而进一步阻止晶片从支撑件“跳出”并且跨开槽。
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公开(公告)号：US07347329B2
公开(公告)日：2008-03-25
申请号：US10971714
申请日：2004-10-22
申请人： John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith , Michael Zabka
发明人： John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith , Michael Zabka
IPC分类号： B65D85/00
CPC分类号： H01L21/67379 , H01L21/67383 , Y10S206/832 , Y10T16/469 , Y10T16/4707
摘要： A carrier for transporting silicon semiconductor wafers during semiconductor wafer processing operations including an enclosure, a door and a flange structured to interface with a machine so that the carrier can be lifted by the machine. A lift saddle connects the flange to the container so that the load on the flange is transferred to a part of the enclosure other than the top of the enclosure to prevent distortion of the enclosure to maintaining seal integrity between the enclosure and the door.
摘要翻译： 一种用于在半导体晶片处理操作期间传输硅半导体晶片的载体，包括壳体，门和与机器接合的凸缘和凸缘，使得载体能够被机器提升。 提升鞍座将法兰连接到容器，使得法兰上的负载被转移到外壳的除了外壳的顶部之外的一部分，以防止外壳变形，以保持外壳和门之间的密封完整性。
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公开(公告)号：US07857683B2
公开(公告)日：2010-12-28
申请号：US12568497
申请日：2009-09-28
IPC分类号： B24B29/00
CPC分类号： B24B37/32 , Y10T29/49826
摘要： An improved chemical mechanical polishing retaining ring. A representative embodiment comprises a base portion made from a wear-resistant plastic material, and an upper portion, or backbone portion, made from a stiffer and more wear resistant material. One of the base or backbone portion is preferably overmolded onto the other. The base portion can be generally defined by a flat pad-contacting surface, an outer surface, and an inner surface. The base portion can additionally include channels extending from the outer surface to the inner surface to facilitate transfer of slurry to and from the substrate to be polished during the process. One or both of the base portion or backbone portion further includes a plurality of circular ribs that serve to create additional bonding surface with the overmolded material. The retaining ring may additionally includes a plurality of bosses with threaded insert holes by which the retaining ring is attached to a chemical mechanical polishing system.
摘要翻译： 改进的化学机械抛光保持环。 代表性的实施例包括由耐磨塑料材料制成的基部，以及由更硬和更耐磨的材料制成的上部或主体部分。 基部或骨架部分中的一个优选地包覆成型在另一个上。 基部一般可以由平垫接触表面，外表面和内表面限定。 基部可以另外包括从外表面延伸到内表面的通道，以便于在该过程期间将浆料转移到待抛光的基底上和从基底转移。 基部或骨架部分中的一个或两个还包括多个圆形肋，其用于与包覆成型的材料产生附加的粘合表面。 保持环可以另外包括具有螺纹插入孔的多个凸台，保持环通过该凸起附接到化学机械抛光系统。
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公开(公告)号：US07677393B2
公开(公告)日：2010-03-16
申请号：US11651779
申请日：2007-01-10
IPC分类号： B65D85/30
CPC分类号： H01L21/67373 , E05B17/0041 , E05B65/006 , E05B2015/0468 , E05B2015/0479 , E05C9/042
摘要： A container for holding a plurality of wafers in an axially aligned, generally parallel spaced apart arrangement includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an open front. At least one wafer support is provided in the enclosure along with a kinematic coupling on the bottom of the enclosure. The container has a door for sealingly closing the open front which includes a chassis and an operable latching mechanism on the chassis. The latching mechanism includes a cam selectively rotatable to shift the latching mechanism between a first favored position and a second favored position and at least one vibration dampener for dampening vibrations generated when the latching mechanism is shifted between the first and second favored positions.
摘要翻译： 用于将多个晶片保持在轴向对准的大致平行间隔开的布置中的容器包括具有顶部，底部，一对相对侧面，后部和敞开前部的外壳部分。 在外壳中提供至少一个晶片支撑件以及在外壳的底部上的运动耦合。 容器具有用于密封地封闭敞开的前部的门，该门包括底盘和在底盘上的可操作的闩锁机构。 闩锁机构包括可选择地旋转的凸轮，以便在第一有利位置和第二偏好位置之间移动闩锁机构，以及至少一个振动阻尼器，用于抑制当锁定机构在第一和第二有利位置之间移动时产生的振动。
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公开(公告)号：US07344030B2
公开(公告)日：2008-03-18
申请号：US10983107
申请日：2004-11-05
IPC分类号： B65D85/48
CPC分类号： H01L21/67373 , H01L21/67386
摘要： A wafer carrier door having an inner door portion and an outer door portion. The inner door portion has a substantially continuous inner surface. The outer door portion extends over at least a portion of the inner door portion. The outer door portion has a plurality of apertures formed therein. The outer door portion is attached to the inner door portion.
摘要翻译： 具有内门部分和外门部分的晶片承载门。 内门部分具有基本连续的内表面。 外门部分在内门部分的至少一部分上延伸。 外门部分具有形成在其中的多个孔。 外门部分附接到内门部分。
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公开(公告)号：US07073667B2
公开(公告)日：2006-07-11
申请号：US10971556
申请日：2004-10-22
CPC分类号： H01L21/67288 , B65D79/02 , G03F1/66 , H01L21/67366
摘要： A semiconductor wafer, substrate, or reticle storage or shipping device that includes a photochromic indicator of exposure to undesired electromagnetic radiation. The present invention includes the incorporation of a photochromic material into the plastic used to fabricate at least a portion of a semiconductor wafer, disk, or reticle shipping or storage containers. The container may include photochromic material in the form of a transparent window or a larger portion of the container. The photochromic material may change color or darkness in response to exposure to a selected range of wavelengths of light.
摘要翻译： 包括暴露于不期望的电磁辐射的光致变色指示剂的半导体晶片，衬底或掩模版存储或运输装置。 本发明包括将光致变色材料结合到用于制造半导体晶片，盘或掩模版运输或存储容器的至少一部分的塑料中。 容器可以包括透明窗口形式的光致变色材料或容器的较大部分。 响应于暴露于所选择的光波长范围，光致变色材料可以改变颜色或黑暗。
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