公开(公告)号：US20090220888A1

公开(公告)日：2009-09-03

申请号：US12316578

申请日：2008-12-12

申请人： James Michael Mori ,  James W. Thackeray ,  Roger F. Sinta ,  Rosemary Bell ,  Robin L. Miller-Fahey ,  Timothy G. Adams ,  Thomas M. Zydowsky ,  Edward K. Pavelchek ,  Manual doCanto

发明人： James Michael Mori ,  James W. Thackeray ,  Roger F. Sinta ,  Rosemary Bell ,  Robin L. Miller-Fahey ,  Timothy G. Adams ,  Thomas M. Zydowsky ,  Edward K. Pavelchek ,  Manual doCanto

IPC分类号： G03F7/004

CPC分类号： G03F7/091 ,  G03F7/0045 ,  G03F7/039 ,  Y10S430/106 ,  Y10S430/111 ,  Y10S430/127

摘要： The present invention provides new photoresist compositions that comprise a resin binder, a photoactive component, particularly an acid generator, and a dye material that contains one or more chromophores that can reduce undesired reflections of exposure radiation. Preferred dye compounds are polymeric materials that include one or more chromophores such as anthracene and other polycyclic moieties that effectively absorb deep UV exposure radiation.

公开(公告)号：US07632630B2

公开(公告)日：2009-12-15

申请号：US11418520

申请日：2006-05-03

申请人： James Michael Mori ,  James W. Thackeray ,  Roger F. Sinta ,  Rosemary Bell ,  Robin L. Miller-Fahey ,  Timothy G. Adams ,  Thomas M. Zydowsky ,  Edward K. Pavelchek ,  Manual doCanto

发明人： James Michael Mori ,  James W. Thackeray ,  Roger F. Sinta ,  Rosemary Bell ,  Robin L. Miller-Fahey ,  Timothy G. Adams ,  Thomas M. Zydowsky ,  Edward K. Pavelchek ,  Manual doCanto

IPC分类号： G03F7/30 ,  G03F7/004

CPC分类号： G03F7/091 ,  G03F7/0045 ,  G03F7/039 ,  Y10S430/106 ,  Y10S430/111 ,  Y10S430/127

摘要： The present invention provides new photoresist compositions that comprise a resin binder, a photoactive component, particularly an acid generator, and a dye material that contains one or more chromophores that can reduce undesired reflections of exposure radiation. Preferred dye compounds are polymeric materials that include one or more chromophores such as anthracene and other polycyclic moieties that effectively absorb deep UV exposure radiation.

摘要翻译： 本发明提供了新的光致抗蚀剂组合物，其包含树脂粘合剂，光活性组分，特别是酸发生剂，以及含有一种或多种可以减少曝光辐射的不希望的反射的发色团的染料。 优选的染料化合物是包括一种或多种发色团，例如蒽和其它有效吸收深紫外线照射辐射的多环部分的聚合材料。

公开(公告)号：US07147983B1

公开(公告)日：2006-12-12

申请号：US08726613

申请日：1996-10-07

申请人： James Michael Mori ,  James W. Thackeray ,  Roger F. Sinta ,  Rosemary Bell ,  Robin L. Miller-Fahey ,  Timothy G. Adams ,  Thomas M. Zydowsky ,  Edward K. Pavelchek ,  Manuel doCanto

发明人： James Michael Mori ,  James W. Thackeray ,  Roger F. Sinta ,  Rosemary Bell ,  Robin L. Miller-Fahey ,  Timothy G. Adams ,  Thomas M. Zydowsky ,  Edward K. Pavelchek ,  Manuel doCanto

IPC分类号： G03F7/04

CPC分类号： G03F7/091 ,  G03F7/0045 ,  G03F7/039 ,  Y10S430/106 ,  Y10S430/111 ,  Y10S430/127

摘要： The present invention provides new photoresist compositions that comprise a resin binder, a photoactive component, particularly an acid generator, and a dye material that contains one or more chromophores that can reduce undesired reflections of exposure radiation. Preferred dye compounds are polymeric materials that include one or more chromophores such as anthracene and other polycyclic moieties that effectively absorb deep UV exposure radiation.