Thin film magnetic head including layered magnetic side poles
    1.
    发明授权
    Thin film magnetic head including layered magnetic side poles 失效
    薄膜磁头包括分层磁极侧极

    公开(公告)号:US5748417A

    公开(公告)日:1998-05-05

    申请号:US641345

    申请日:1996-05-01

    摘要: A thin film magnetic head is fabricated on a substrate by depositing a seed layer on the substrate. This seed layer is advantageously used as a common seed for a plurality of magnetic head related structures which are built-up on the substrate. A lower magnetic layer is plated on the substrate in an opening provided in an insulative layer which is deposited on the substrate. The aforementioned seed layer is used as the seed for this lower magnetic layer. A plurality of magnetic layers are plated at one end of the lower magnetic layer to build-up and form a first side pole by using the above seed layer as a seed. Another plurality of magnetic layers are plated at the other end of the lower magnetic layer to build-up and form a second side pole by using the same seed layer as a seed. The first and second side poles thus formed include upper and lower ends, the lower ends being plated to the ends of the lower magnetic layer. A first upper pole is plated to the upper end of the first side pole. The first upper pole includes a gap end facing the second side pole. A gap region of nonmagnetic material is deposited adjacent the gap end of the first upper pole. A second upper pole is plated to the upper end of the second side pole and includes a gap end adjacent the gap region.

    摘要翻译: 通过在衬底上沉积种子层,在衬底上制造薄膜磁头。 该种子层有利地用作在基底上积累的多个磁头相关结构的常见种子。 在设置在沉积在基板上的绝缘层中的开口中,在基板上电镀下层磁性层。 上述种子层用作该下层磁性层的种子。 多个磁性层通过使用上述种子层作为种子在下部磁性层的一端进行电镀以形成第一侧极。 另外多个磁性层在下部磁性层的另一端被电镀,以通过使用与种子相同的种子层来形成第二侧极。 这样形成的第一和第二侧极包括上端和下端,下端被电镀到下磁性层的端部。 第一上极被电镀到第一侧极的上端。 第一上极包括面向第二侧极的间隙端。 非磁性材料的间隙区域邻近第一上极的间隙端部沉积。 第二上极被电镀到第二侧极的上端,并且包括邻近间隙区的间隙端。

    Method of fabricating a thin film magnetic head including layered
magnetic side poles
    2.
    发明授权
    Method of fabricating a thin film magnetic head including layered magnetic side poles 失效
    包括层状磁性侧极的薄膜磁头的制造方法

    公开(公告)号:US5673474A

    公开(公告)日:1997-10-07

    申请号:US722702

    申请日:1996-09-30

    IPC分类号: G11B5/235 G11B5/31 G11B5/42

    摘要: A method is provided for fabricating a thin film magnetic head on a substrate. A seed layer formed on the substrate and advantageously used as a common seed for a plurality of magnetic head related structures which are built-up on the substrate. A lower magnetic layer is plated on the substrate in an opening provided in an insulative layer which is deposited on the substrate. The aforementioned seed layer is used as the seed for the plating of this lower magnetic layer. A plurality of magnetic layers are plated at one end of the lower magnetic layer to build-up and form a first side pole by again using the aforementioned seed layer as a seed. Another plurality of magnetic layers are plated at the other end of the lower magnetic layer to build-up and form a second side pole by using the same seed layer as a seed. The first and second side poles thus formed include upper and lower ends, the lower ends being plated to the ends of the lower magnetic layer. A first upper pole is plated to the upper end of the first side pole. The first upper pole includes a gap end facing the second side pole. A gap region of nonmagnetic material is deposited adjacent the gap end of the first upper pole. A second upper pole is plated to the upper end of the second side pole and includes a gap end adjacent the gap region.

    摘要翻译: 提供了一种在衬底上制造薄膜磁头的方法。 种子层,形成在衬底上并且有利地用作在衬底上积累的多个与磁头相关的结构的共同种子。 在设置在沉积在基板上的绝缘层中的开口中,在基板上电镀下层磁性层。 使用上述种子层作为用于该下部磁性层的电镀的种子。 多个磁性层在下部磁性层的一端被电镀以再次使用上述种子层作为种子来积聚并形成第一侧极。 另外多个磁性层在下部磁性层的另一端被电镀,以通过使用与种子相同的种子层来形成第二侧极。 这样形成的第一和第二侧极包括上端和下端,下端被电镀到下磁性层的端部。 第一上极被电镀到第一侧极的上端。 第一上极包括面向第二侧极的间隙端。 非磁性材料的间隙区域邻近第一上极的间隙端部沉积。 第二上极被电镀到第二侧极的上端,并且包括邻近间隙区的间隙端。

    Thin film magnetic head including an integral layered shield structure
    3.
    发明授权
    Thin film magnetic head including an integral layered shield structure 失效
    薄膜磁头包括一体的分层屏蔽结构

    公开(公告)号:US5490028A

    公开(公告)日:1996-02-06

    申请号:US297183

    申请日:1994-08-26

    摘要: A thin film magnetic head is fabricated on a substrate by depositing a lower shield layer on the substrate. A lower layer of a magnetic yoke is situated on the lower shield layer to couple the yoke to the shield. Alternatively, the magnetic yoke is isolated from the lower shield layer by an insulative layer therebetween. At the same time that first and second magnetic side poles are built up layer by layer via successive plating operations at the respective ends of a lower magnetic layer of the yoke, a side shield structure is plated up, layer by layer, at the periphery of the lower shield layer to surround resultant side pole structure. A shield cover is plated on the top of the side shield to substantially enclose the side pole structure, but leave an opening for an insulative pedestal though which the tops of the side poles extend. First and second magnetic poles are plated to the tops of the first and second side poles such that a gap region of non-magnetic material is formed therebetween.

    摘要翻译: 通过在衬底上沉积下屏蔽层,在衬底上制造薄膜磁头。 磁轭的下层位于下屏蔽层上,以将磁轭耦合到屏蔽。 或者,磁轭通过其间的绝缘层与下屏蔽层隔离。 同时,通过在磁轭的下磁性层的各个端部处经过连续的电镀操作逐层地构成第一和第二磁性侧极,侧屏蔽结构逐层地在 所述下屏蔽层围绕所得到的侧极结构。 屏蔽盖被镀在侧护罩的顶部上以基本上封闭侧杆结构,但是留下用于绝缘基座的开口,侧极的顶部延伸通过该开口。 第一和第二磁极被电镀到第一和第二侧极的顶部,使得在它们之间形成非磁性材料的间隙区域。

    Thin film magnetic head including durable wear layer and non-magnetic
gap structures
    4.
    发明授权
    Thin film magnetic head including durable wear layer and non-magnetic gap structures 失效
    薄膜磁头包括耐磨层和非磁隙结构

    公开(公告)号:US5801909A

    公开(公告)日:1998-09-01

    申请号:US650587

    申请日:1996-05-20

    摘要: A thin film magnetic head is fabricated on a substrate by depositing a seed layer on the substrate. A lower magnetic layer is plated on the substrate in an opening provided in an insulative layer which is deposited on the seed layer. A plurality of magnetic layers are plated at one end of the lower magnetic layer to build-up and form a first side pole by using the above seed layer as a seed. Another plurality of magnetic layers are plated at the other end of the lower magnetic layer to build-up and form a second side pole by using the same seed layer as a seed. The first and second side poles thus formed include upper and lower ends, the lower ends being plated to the ends of the lower magnetic layer. A first upper pole is plated to the upper end of the first side pole. The first upper pole includes a gap end facing the second side pole. A gap region of nonmagnetic material is deposited adjacent the gap end of the first upper pole. A second upper pole is plated to the upper end of the second side pole and includes a gap end adjacent the gap region. A diamond-like carbon (DLC) frame is fabricated at the uppermost portion of the head surrounding the upper side poles and gap region. The DLC frame provides both structural integrity to the head and wear protection when the head contacts the media surface.

    摘要翻译: 通过在衬底上沉积种子层,在衬底上制造薄膜磁头。 在设置在沉积在种子层上的绝缘层中的开口中的基底上镀有下部磁性层。 多个磁性层通过使用上述种子层作为种子在下部磁性层的一端进行电镀以形成第一侧极。 另外多个磁性层在下部磁性层的另一端被电镀,以通过使用与种子相同的种子层来形成第二侧极。 这样形成的第一和第二侧极包括上端和下端,下端被电镀到下磁性层的端部。 第一上极被电镀到第一侧极的上端。 第一上极包括面向第二侧极的间隙端。 非磁性材料的间隙区域邻近第一上极的间隙端部沉积。 第二上极被电镀到第二侧极的上端,并且包括邻近间隙区的间隙端。 在围绕上侧极和间隙区域的头部的最上部制造类金刚石碳(DLC)框架。 当头部接触介质表面时,DLC框架提供了头部的结构完整性和磨损保护。

    Thin film magnetic head including a separately deposited diamond-like
carbon gap structure and magnetic control wells
    5.
    发明授权
    Thin film magnetic head including a separately deposited diamond-like carbon gap structure and magnetic control wells 失效
    薄膜磁头包括单独沉积的类金刚石碳隙结构和磁控井

    公开(公告)号:US6091581A

    公开(公告)日:2000-07-18

    申请号:US795268

    申请日:1997-02-10

    IPC分类号: G11B5/31 G11B5/147 G11B5/187

    CPC分类号: G11B5/3106 G11B5/3183

    摘要: A thin film magnetic head is provided in which a magnetic yoke assembly is built up, layer by layer, atop a substrate using semiconductor thin film techniques. A lower yoke assembly is first fabricated including a lower magnetic layer situated on the substrate and first and second side poles built up vertically from the ends of the lower magnetic layer. A coil structure is situated about one of the side poles and is separated therefrom by planar insulative layers in which the coil structure is disposed. An insulative pedestal surrounded by a frame is formed at the top of the lower yoke assembly and extends above the uppermost lateral plane of the yoke assembly. A diamond-like carbon (DLC) wear layer is deposited atop the pedestal. A pole well is excavated in the DLC layer so as to expose the first and second side poles therebelow. A first magnetic pole including a gap end is plated in the pole well at the top of the first side pole and extending toward the second side pole. A DLC gap region is deposited in the pole well at the gap end of the first magnetic pole. A second magnetic pole is then plated in the pole well between the second side pole and the DLC gap region. The upper surface of the head is machined to form a head surface which contacts or which nearly contacts the surface of a magnetic media.

    摘要翻译: 提供一种薄膜磁头,其中使用半导体薄膜技术逐层地在基板顶上构建磁轭组件。 首先制造下轭组件,其包括位于衬底上的下磁层和从下磁层的端部垂直构成的第一和第二侧极。 线圈结构围绕一个侧极位于其中,并且通过设置线圈结构的平面绝缘层与其分离。 在框架的顶部形成有由框架包围的绝缘基座,并且在轭组件的最上侧的横向平面上方延伸。 钻石状碳(DLC)耐磨层沉积在基座顶部。 在DLC层中挖出极井,以暴露其下的第一和第二侧极。 包括间隙端的第一磁极被电镀在第一侧极的顶部的极孔中并且朝向第二侧极延伸。 DLC间隙区域沉积在第一磁极的间隙端的极孔中。 然后将第二磁极电镀在第二侧极和DLC间隙区域之间的极井中。 头部的上表面被加工成形成与磁性介质的表面接触或几乎接触的头表面。

    Thin magnetic film including multiple geometry gap structures on a
common substrate
    6.
    发明授权
    Thin magnetic film including multiple geometry gap structures on a common substrate 失效
    薄的磁性薄膜包括在共同的基底上的多个几何间隙结构

    公开(公告)号:US5909346A

    公开(公告)日:1999-06-01

    申请号:US882370

    申请日:1997-06-25

    IPC分类号: G11B5/31 G11B5/48 G11B5/147

    摘要: A thin film magnetic head assembly is provided which includes a plurality of thin film heads situated atop a common substrate. An insulative main body is built up layer by layer on the substrate. A plurality of magnetic yokes exhibiting different geometries are situated on the substrate and within the main body. The magnetic yokes are built up layer by layer at the same time that the insulative main body is fabricated. A plurality of coil structures are situated within the main body and are magnetically coupled to respective magnetic yokes. The head assembly also includes a pedestal of insulative material situated atop the main body and exhibiting a lateral dimension less than that of the main body. The pedestal protrudes upwardly away from the main body and substrate. The magnetic yokes each include a pole piece pair situated atop the pedestal, each pole piece pair including first and second magnetic pole pieces. Each pole piece pair exhibits a different geometry than another pole piece pair. Each pole piece pair forms a head which is adapted to reading/writing a track on a magnetic medium, the tracks of which are compatible with the geometry of that pole piece pair.

    摘要翻译: 提供一种薄膜磁头组件,其包括位于公共衬底顶部的多个薄膜头。 在基板上逐层建立绝缘主体。 呈现不同几何形状的多个磁轭位于基板上并在主体内。 在制造绝缘主体的同时,磁轭被逐层地构建。 多个线圈结构位于主体内并磁耦合到相应的磁轭。 头部组件还包括位于主体顶部并具有小于主体的横向尺寸的绝缘材料的基座。 基座从主体和基板向上突出。 磁轭各自包括位于基座顶部的极靴对,每个极片对包括第一和第二磁极片。 每个极片对具有与另一个极片对不同的几何形状。 每个极片对形成头部,其适于在磁性介质上读取/写入轨道,轨道与该极靴对的几何形状兼容。

    Method of fabricating a thin film conductor coil assembly
    7.
    发明授权
    Method of fabricating a thin film conductor coil assembly 失效
    制造薄膜导体线圈组件的方法

    公开(公告)号:US5853558A

    公开(公告)日:1998-12-29

    申请号:US789913

    申请日:1997-01-31

    摘要: A thin film helical conductor coil assembly includes an electrically-nonconducting ceramic substrate having a substantially planar surface and separated first and second magnetic elements which mutually bound a volume of the ceramic substrate. The thin film conductor coil assembly also includes a thin film magnetic core, which magnetically connects the first magnetic element to the second magnetic element. The thin film magnetic core, which overlies the substantially planar surface of the ceramic substrate, is constructed from a compliant electroplated magnetic material. The thin film conductor coil assembly further includes an electroplated thin film helical coil which traverses about the thin film magnetic core and forms a conductive path from a first terminal to a second terminal.

    摘要翻译: 薄膜螺旋导体线圈组件包括具有基本平坦的表面的电非导体陶瓷衬底,并且分离的第一和第二磁性元件相互结合陶瓷衬底的体积。 薄膜导体线圈组件还包括将第一磁性元件与第二磁性元件磁连接的薄膜磁芯。 覆盖在陶瓷基板的基本上平坦的表面上的薄膜磁芯由柔性电镀的磁性材料构成。 薄膜导体线圈组件还包括电镀薄膜螺旋线圈,其绕薄膜磁芯穿过并形成从第一端子到第二端子的导电路径。

    Thin film magnetic head including an elevated gap structure
    8.
    发明授权
    Thin film magnetic head including an elevated gap structure 失效
    薄膜磁头包括升高的间隙结构

    公开(公告)号:US5754377A

    公开(公告)日:1998-05-19

    申请号:US296388

    申请日:1994-08-26

    摘要: A thin film magnetic head is provided in which a magnetic yoke assembly is built up, layer by layer, atop a substrate using semiconductor thin film techniques. A lower yoke assembly is first fabricated including a lower magnetic layer situated on the substrate and first and second side poles built up vertically from the ends of the lower magnetic layer. An insulative pedestal surrounded by a frame is formed at the top of the lower yoke assembly and extends above the uppermost lateral plane of the yoke assembly. A diamond-like carbon (DLC) wear layer is deposited atop the pedestal. First and second pole support wells are excavated in the DLC layer so as to expose the first and second side poles therebelow, and further to receive first and second pole supports, respectively, therein. First and second pole extension members are situated on the first and second pole support members, respectively, with a non-magnetic gap region being situated between the first and second pole extension members. A second DLC layer is situated in the same plane as the non-magnetic gap region and the first and second pole extension members. The second DLC layer substantially surrounds the first and second side pole extensions and the gap region. In this manner, the gap region is elevated above the plane of the first and second pole support members and is protected from undesired head wear.

    摘要翻译: 提供一种薄膜磁头,其中使用半导体薄膜技术逐层地在基板顶上构建磁轭组件。 首先制造下轭组件,其包括位于衬底上的下磁层和从下磁层的端部垂直构成的第一和第二侧极。 在框架的顶部形成有由框架包围的绝缘基座,并且在轭组件的最上侧的横向平面上方延伸。 钻石状碳(DLC)耐磨层沉积在基座顶部。 第一和第二极支撑井在DLC层中被挖掘,以便露出其下的第一和第二侧极,并且还分别容纳第一和第二极支撑。 第一和第二极延伸构件分别位于第一和第二极支撑构件上,非磁性间隙区域位于第一和第二极延伸构件之间。 第二DLC层位于与非磁隙区域以及第一和第二极延伸构件相同的平面中。 第二DLC层基本上围绕第一和第二侧极延伸部分和间隙区域。 以这种方式,间隙区域升高到第一和第二极支撑构件的平面之上,并且防止间隙区域发生不期望的头部磨损。

    Method of making thin film magnetic head including a durable wear layer
and gap structure
    9.
    发明授权
    Method of making thin film magnetic head including a durable wear layer and gap structure 失效
    制造薄膜磁头的方法,包括耐用耐磨层和间隙结构

    公开(公告)号:US5737825A

    公开(公告)日:1998-04-14

    申请号:US632823

    申请日:1996-04-16

    摘要: A thin film magnetic head is provided in which a magnetic yoke assembly is built up, layer by layer, atop a substrate using semiconductor thin film techniques. A lower yoke assembly is first fabricated including a lower magnetic layer situated on the substrate and first and second side poles built up vertically from the ends of the lower magnetic layer. An insulative pedestal surrounded by a frame is formed at the top of the lower yoke assembly and extends above the uppermost lateral plane of the yoke assembly. A diamond-like carbon (DLC) wear layer is deposited atop the pedestal. First and second pole wells are excavated in the DLC layer so as to expose the first and second side poles therebelow and to form a DLC gap region between the first and second side poles. First and second magnetic poles are then formed in the first and second pole wells, respectively.

    摘要翻译: 提供一种薄膜磁头,其中使用半导体薄膜技术逐层地在基板顶上构建磁轭组件。 首先制造下轭组件,其包括位于衬底上的下磁层和从下磁层的端部垂直构成的第一和第二侧极。 在框架的顶部形成有由框架包围的绝缘基座,并且在轭组件的最上侧的横向平面上方延伸。 钻石状碳(DLC)耐磨层沉积在基座顶部。 第一和第二极孔在DLC层中被挖掘,以暴露第一和第二侧极,并且在第一和第二侧极之间形成DLC间隙区。 然后分别在第一和第二极孔中形成第一和第二磁极。

    Thin film coil head assembly with protective planarizing cocoon structure
    10.
    发明授权
    Thin film coil head assembly with protective planarizing cocoon structure 失效
    薄膜线圈头组件具有保护性平面化茧结构

    公开(公告)号:US5684660A

    公开(公告)日:1997-11-04

    申请号:US438230

    申请日:1995-05-09

    IPC分类号: G11B5/31 G11B5/53 G11B5/147

    摘要: A thin film head is disclosed which is miniaturized to fit within a reduced size window or circumferential slot in a rotary head assembly. The thin film head and window or slot can be made so small that undesired tape cupping into the window or slot is significantly reduced. The thin film head includes a substrate of electrically insulative material. In one embodiment, a substantially helical thin film coil structure is situated atop the substrate. A magnetic core extends through the coil structure so that the coil structure can magnetically excite the core. The core includes first and second side pole members. A protective cocoon of electrically insulative material covers the coil structure and the core except for ends of the first and second side pole members. The cocoon includes an upper planar surface which exposes the ends of the first and second side pole members to permit coupling thereto by a magnetic gap structure. An elevated thin film magnetic gap structure is positioned atop the coil structure and the upper planar surface of the protective cocoon. Protection from ambient conditions is thus provided to both the coil structure and the magnetic core while simultaneously enhancing the planarity of the layers above the planar upper surface of the protective cocoon.

    摘要翻译: 公开了一种薄膜头,其小型化以配合在旋转头组件中的减小尺寸的窗口或周向槽中。 薄膜头部和窗口或狭槽可以制成如此小,从而显着地减少了对窗口或狭槽的不期望的磁带拔罐。 薄膜头包括电绝缘材料的基片。 在一个实施例中,基本上螺旋形的薄膜线圈结构位于衬底顶部。 磁芯延伸穿过线圈结构,使得线圈结构可以磁激励磁芯。 芯部包括第一和第二侧面杆部件。 电绝缘材料的保护性茧覆盖除了第一和第二侧极构件的端部之外的线圈结构和芯。 茧包括上平坦表面,其暴露第一和第二侧极构件的端部以允许通过磁隙结构与其连接。 升高的薄膜磁隙结构位于线圈结构顶部和保护性茧的上平面上。 因此,能够将保护环境的环境提供给线圈结构和磁芯,同时提高保护性茧的平面上表面上方的层的平面度。