ORGANIC EL DEVICE MANUFACTURING METHOD AND APPARATUS
    3.
    发明申请
    ORGANIC EL DEVICE MANUFACTURING METHOD AND APPARATUS 审中-公开
    有机EL器件制造方法和装置

    公开(公告)号:US20130288402A1

    公开(公告)日:2013-10-31

    申请号:US13995539

    申请日:2011-11-04

    IPC分类号: H01L51/56

    摘要: An organic EL device manufacturing method includes a vapor deposition step of supplying a substrate, and while moving the substrate with a side thereof, on which an electrode layer is not provided, in contact with a surface of a can roller that rotates, discharging an evaporated organic layer forming material from a nozzle of a vapor deposition source to form an organic layer over a side of the substrate on which the electrode layer is provided, wherein the vapor deposition step is performed while, using a distance measuring section capable of measuring a first distance to the substrate supported by the can roller, and a position adjusting section capable of adjusting a second distance between the nozzle of the vapor deposition source and a surface of the substrate, control is performed by the position adjusting section so that the second distance is constant.

    摘要翻译: 一种有机EL元件的制造方法,其特征在于,包括:供给基板的蒸镀工序,在不设置电极层的一侧的基板移动的同时,与旋转的罐辊的表面接触, 从气相沉积源的喷嘴形成有机层形成材料,以在其上提供电极层的基板的一侧上形成有机层,其中执行气相沉积步骤,同时使用能够测量第一 距罐头辊支撑的基板的距离以及能够调节蒸镀源的喷嘴与基板的表面之间的第二距离的位置调整部,通过位置调整部进行控制,使得第二距离为 不变。