公开(公告)号：US6137212A

公开(公告)日：2000-10-24

申请号：US87690

申请日：1998-05-26

申请人： Jiang Liu ,  David Morton ,  Philip Krzyzkowski ,  M. Robert Miller

发明人： Jiang Liu ,  David Morton ,  Philip Krzyzkowski ,  M. Robert Miller

IPC分类号： H01J31/12 ,  H01J1/46 ,  H01J1/02

CPC分类号： H01J31/127

摘要： A method for forming a field emission flat panel display includes deposit a conductive patterned layer on a substrate, depositing an emitter material over the patterned layer, patterning the emitter material to provide a series of mask caps, etching the emitter material to provide arrays of emitter peaks with the mask caps thereon, depositing a dielective layer on the patterned layer and on the mask caps, depositing a conductive gate layer on the dielectric layer, depositing a high-resistivity dielectric layer on the gate layer, depositing a low-resistivity dielectric layer on the high-resistivity dielectric layer, and etching away portions of the dielectric layer, gate layer, high-resistivity dielectric layer and low-resistivity dielectric layer to expose the mask caps, and removing the mask caps to expose the emitter peaks to provide an emitter cathode panel, providing a transparent panel having a conductive coating thereon, and depositing a layer of thin film phosphors on the conductive coating to provide an anode screen, and attaching the anode screen to the cathode panel.

摘要翻译： 用于形成场发射平板显示器的方法包括在衬底上沉积导电图案化层，在图案化层上沉积发射体材料，图案化发射极材料以提供一系列掩模帽，蚀刻发射极材料以提供发射极阵列 在其上具有掩模帽的峰，在图案化层和掩模帽上沉积半导体层，在电介质层上沉积导电栅极层，在栅极层上沉积高电阻率电介质层，沉积低电阻率介电层 在高电阻率电介质层上，并且蚀刻掉电介质层，栅极层，高电阻介电层和低电阻率电介质层的部分以暴露掩模帽，以及去除掩模帽以露出发射极峰以提供 发射极阴极面板，提供在其上具有导电涂层的透明面板，以及在所述连接器上沉积薄膜荧光体层 导电涂层以提供阳极屏幕，并将阳极屏幕附接到阴极面板。