公开(公告)号：US07369298B2

公开(公告)日：2008-05-06

申请号：US11147344

申请日：2005-06-08

申请人： Jin-ho Lee ,  Young-chul Ko ,  Hyun-ku Jeong

发明人： Jin-ho Lee ,  Young-chul Ko ,  Hyun-ku Jeong

IPC分类号： A61B26/00 ,  A61B26/08

CPC分类号： G02B26/105 ,  G02B26/0841 ,  H04N9/3129

摘要： Provided are an optical scanner including a micro-mirror having an improved a driving angle by using a micro-electro-mechanical system (MEMS) technique and a laser image projector using the same are provided. The optical scanner includes: a substrate; a mirror unit suspended over the substrate and spaced apart from the substrate by a predetermined distance; a supporter situated on the substrate and supporting both ends of the mirror unit so that the mirror unit is suspended over the substrate; a supporting axis connected between both ends of the mirror unit and the supporter so that the mirror unit can be rotatably supported by the supporter; a plurality of movable comb electrodes vertically formed on both sides of the mirror unit; and a plurality of static comb electrodes vertically formed on the substrate in such a way that the static comb electrodes alternate with the movable comb electrodes, wherein the static comb electrode is a two-layer structured electrode.

摘要翻译： 提供了一种包括通过使用微机电系统（MEMS）技术具有改进的驱动角度的微反射镜的光学扫描器，并且提供了使用其的激光图像投影仪。 光学扫描器包括：基板; 镜子单元悬挂在基板上并与基板隔开预定距离; 支撑体，其位于所述基板上并且支撑所述反射镜单元的两端，使得所述反射镜单元悬挂在所述基板上; 连接在反射镜单元的两端和支撑体之间的支撑轴，使得反射镜单元能够被支撑件可旋转地支撑; 多个可动梳状电极，垂直地形成在反射镜单元的两侧; 以及多个静电梳电极，其以所述静电梳电极与所述可动梳电极交替的方式垂直地形成在所述基板上，其中所述静电梳电极为双层结构电极。

公开(公告)号：US20060268383A1

公开(公告)日：2006-11-30

申请号：US11387958

申请日：2006-03-24

申请人： Jin-woo Cho ,  Young-chul Ko ,  Jin-ho Lee ,  Hyun-ku Jeong

发明人： Jin-woo Cho ,  Young-chul Ko ,  Jin-ho Lee ,  Hyun-ku Jeong

IPC分类号： G02B26/08 ,  G02B26/00 ,  H02N1/00

CPC分类号： G02B26/0841 ,  H02N1/008

摘要： Optical scanners having a multi-layered comb electrode structure and methods to increase driving force and angle are provided. The optical scanner includes: a stage which performs a seesaw motion in a first direction; a support unit which supports the seesaw motion of the stage; and a stage driving unit including driving comb electrodes extending outward from opposite sides of the stage in the first direction and fixed comb electrodes extending from the support unit facing the driving comb electrodes such that the driving comb electrodes and the fixed comb electrodes alternate with each other. Each of the stage, the support unit, and the stage driving unit is made of a plurality of conductive layers and insulation layers between the conductive layers.

摘要翻译： 提供具有多层梳状电极结构的光学扫描器和增加驱动力和角度的方法。 光学扫描器包括：在第一方向上执行跷跷板运动的平台; 支撑台架的跷跷板运动的支撑单元; 以及舞台驱动单元，其包括从第一方向的舞台的相对侧向外延伸的驱动梳状电极和从支撑单元向着驱动梳状电极延伸的固定梳状电极，使得驱动梳状电极和固定梳状电极彼此交替 。 舞台，支撑单元和舞台驱动单元中的每一个由导电层之间的多个导电层和绝缘层制成。

公开(公告)号：US20060082250A1

公开(公告)日：2006-04-20

申请号：US11248169

申请日：2005-10-13

申请人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho ,  Hyun-ku Jeong

发明人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho ,  Hyun-ku Jeong

IPC分类号： G02B26/08 ,  G02B26/00 ,  H02N1/00

CPC分类号： H02N1/008 ,  G02B26/0841

摘要： Provided are a biaxial actuator and a method of manufacturing the same. The biaxial actuator includes: a stage unit seesawing in a first direction; a first support unit supporting the stage unit; a stage unit driving unit including first driving comb electrodes outwardly extending from opposite sides of the stage unit in the first direction, and first fixed comb electrodes extending from the first support unit facing the first driving comb electrodes such that the first driving and fixed comb electrodes alternate with each other; a second support unit supporting the first support unit such that the first support unit seesaws in a second direction perpendicular to the first direction; and a first support unit driving unit including second driving comb electrodes installed at the first support unit, and second fixed comb electrodes corresponding to the second driving comb electrodes, wherein the first and second driving comb electrodes and the stage unit are formed at a first level, and the first and second fixed comb electrodes are formed at a second level lower than the first level such that the first and second fixed comb electrodes do not overlap with the first and second driving comb electrodes at a vertical plane.

摘要翻译： 提供双轴致动器及其制造方法。 双轴致动器包括：在第一方向上跷跷板的台架单元; 支撑舞台单元的第一支撑单元; 舞台单元驱动单元，包括从第一方向上的舞台单元的相对侧向外延伸的第一驱动梳状电极和从第一支撑单元延伸到第一驱动梳状电极的第一固定梳状电极，使得第一驱动和固定梳状电极 互相交替; 第二支撑单元，其支撑所述第一支撑单元，使得所述第一支撑单元在垂直于所述第一方向的第二方向上跷跷板; 以及第一支撑单元驱动单元，包括安装在第一支撑单元处的第二驱动梳状电极和与第二驱动梳状电极相对应的第二固定梳状电极，其中第一和第二驱动梳状电极和平台单元形成在第一级 并且第一和第二固定梳电极形成在比第一电平低的第二电平处，使得第一和第二固定梳电极在垂直平面处不与第一和第二驱动梳电极重叠。

公开(公告)号：US07508111B2

公开(公告)日：2009-03-24

申请号：US11248169

申请日：2005-10-13

申请人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho ,  Hyun-ku Jeong

发明人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho ,  Hyun-ku Jeong

IPC分类号： H02N1/00 ,  G02B26/08

CPC分类号： H02N1/008 ,  G02B26/0841

摘要： Provided are a biaxial actuator and a method of manufacturing the same. The biaxial actuator includes: a stage unit seesawing in a first direction; a first support unit supporting the stage unit; a stage unit driving unit including first driving comb electrodes outwardly extending from opposite sides of the stage unit in the first direction, and first fixed comb electrodes extending from the first support unit facing the first driving comb electrodes such that the first driving and fixed comb electrodes alternate with each other; a second support unit supporting the first support unit such that the first support unit seesaws in a second direction perpendicular to the first direction; and a first support unit driving unit including second driving comb electrodes installed at the first support unit, and second fixed comb electrodes corresponding to the second driving comb electrodes, wherein the first and second driving comb electrodes and the stage unit are formed at a first level, and the first and second fixed comb electrodes are formed at a second level lower than the first level such that the first and second fixed comb electrodes do not overlap with the first and second driving comb electrodes at a vertical plane.

摘要翻译： 提供双轴致动器及其制造方法。 双轴致动器包括：在第一方向上跷跷板的平台单元; 支撑舞台单元的第一支撑单元; 舞台单元驱动单元，包括从第一方向上的舞台单元的相对侧向外延伸的第一驱动梳状电极和从第一支撑单元延伸到第一驱动梳状电极的第一固定梳状电极，使得第一驱动和固定梳状电极 互相交替; 第二支撑单元，其支撑所述第一支撑单元，使得所述第一支撑单元在垂直于所述第一方向的第二方向上跷跷板; 以及第一支撑单元驱动单元，包括安装在第一支撑单元处的第二驱动梳状电极和与第二驱动梳状电极相对应的第二固定梳状电极，其中第一和第二驱动梳状电极和平台单元形成在第一级 并且第一和第二固定梳电极形成在比第一电平低的第二电平处，使得第一和第二固定梳电极在垂直平面处不与第一和第二驱动梳电极重叠。

公开(公告)号：US20060023284A1

公开(公告)日：2006-02-02

申请号：US11147344

申请日：2005-06-08

申请人： Jin-ho Lee ,  Young-chul Ko ,  Hyun-ku Jeong

发明人： Jin-ho Lee ,  Young-chul Ko ,  Hyun-ku Jeong

IPC分类号： G02B26/08

CPC分类号： G02B26/105 ,  G02B26/0841 ,  H04N9/3129

摘要： Provided are an optical scanner including a micro-mirror having an improved a driving angle by using a micro-electro-mechanical system (MEMS) technique and a laser image projector using the same are provided. The optical scanner includes: a substrate; a mirror unit suspended over the substrate and spaced apart from the substrate by a predetermined distance; a supporter situated on the substrate and supporting both ends of the mirror unit so that the mirror unit is suspended over the substrate; a supporting axis connected between both ends of the mirror unit and the supporter so that the mirror unit can be rotatably supported by the supporter; a plurality of movable comb electrodes vertically formed on both sides of the mirror unit; and a plurality of static comb electrodes vertically formed on the substrate in such a way that the static comb electrodes alternate with the movable comb electrodes, wherein the static comb electrode is a two-layer structured electrode.

摘要翻译： 提供了一种包括通过使用微机电系统（MEMS）技术具有改进的驱动角度的微反射镜的光学扫描器，并且提供了使用其的激光图像投影仪。 光学扫描器包括：基板; 镜子单元悬挂在基板上并与基板隔开预定距离; 支撑体，其位于所述基板上并且支撑所述反射镜单元的两端，使得所述反射镜单元悬挂在所述基板上; 连接在反射镜单元的两端和支撑体之间的支撑轴，使得反射镜单元能够被支撑件可旋转地支撑; 多个可动梳状电极，垂直地形成在反射镜单元的两侧; 以及多个静电梳电极，其以所述静电梳电极与所述可动梳状电极交替的方式垂直地形成在所述基板上，其中所述静电梳电极为双层结构电极。

公开(公告)号：US20090130847A1

公开(公告)日：2009-05-21

申请号：US12123495

申请日：2008-05-20

申请人： Hyun-ku Jeong ,  Seok-gin Kang ,  Jin-ho Lee

发明人： Hyun-ku Jeong ,  Seok-gin Kang ,  Jin-ho Lee

IPC分类号： H01L21/768

CPC分类号： H01L21/7684 ,  H01L21/76829 ,  H01L21/76831

摘要： Provided is a method of fabricating a metal pattern so that an insulation layer between a wafer and the metal pattern can be prevented from being damaged in a planarization procedure when the metal pattern having a trench structure is fabricated on the wafer. The method includes operations of forming a first insulation layer on a surface of the wafer; selectively etching the surface of the wafer and the first insulation layer so as to form a plurality of trenches; forming a second insulation layer on a bottom and side walls of the plurality of trenches by using a thermal oxidation method; filling a metal inside the plurality of trenches; and performing planarization by removing the metal deposited outside the plurality of trenches.

摘要翻译： 提供了一种制造金属图案的方法，使得当在晶片上制造具有沟槽结构的金属图案时，可以在平坦化过程中防止晶片和金属图案之间的绝缘层损坏。 该方法包括在晶片的表面上形成第一绝缘层的操作; 选择性地蚀刻晶片和第一绝缘层的表面以形成多个沟槽; 通过使用热氧化法在所述多个沟槽的底壁和侧壁上形成第二绝缘层; 在多个沟槽内填充金属; 并通过去除沉积在多个沟槽外部的金属来进行平坦化。

公开(公告)号：US07301692B2

公开(公告)日：2007-11-27

申请号：US11668713

申请日：2007-01-30

申请人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho

发明人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho

IPC分类号： G02B26/00 ,  G02B26/08 ,  H01L29/00 ,  H02N1/00 ,  C23F1/00

CPC分类号： G02B26/0833 ,  G02B26/105

摘要： Disclosed is a micro mirror having a structure improved to have an increased driving angle while being driven in high speed. The micro mirror comprises a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section comprising mobile combs arranged on the adjoining section, and a fixed comb provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without increasing rotational inertia moment so largely. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.

摘要翻译： 公开了一种微镜，其具有改进以在高速驱动的同时具有增加的驱动角的结构。 微反射镜包括反射光的可旋转镜部分，用于支撑镜部分的一对弹簧部分，并且当镜部被旋转驱动时用作镜部分的旋转轴线，用于连接镜部分的椭圆形邻接部分和 一对弹簧部分，以及包括设置在相邻部分上的移动梳状部分的驱动部分，以及设置在移动梳状体上方和/或下方的固定梳齿，以对应于移动梳来产生静电力。 根据本发明，通过存在椭圆形相邻部分，可以大大提高力矩而不增加旋转惯性矩。 因此，可以提供具有增加的驱动角度的高速光学扫描仪，这是高分辨率激光电视所需要的。

公开(公告)号：US07149022B2

公开(公告)日：2006-12-12

申请号：US10872480

申请日：2004-06-22

申请人： Yong-kweun Mun ,  Ju-hyun Lee ,  Young-chul Ko ,  Jin-ho Lee

发明人： Yong-kweun Mun ,  Ju-hyun Lee ,  Young-chul Ko ,  Jin-ho Lee

IPC分类号： G02B26/08

CPC分类号： G02B26/0841

摘要： An optical scanner and a method of manufacturing the same are provided. The optical scanner comprises a rectangular frame, a H-shaped stage, which is linearly driven in a second direction perpendicular to a first direction of a central axis inside the frame and includes a central area positioned in a direction of the central axis and four extended areas that extend from both opposite sides of the central area parallel to the central axis, a cylindrical mirror, which is disposed on the central area and scans a laser beam incident on the surface thereof in the second direction, torsion bars, which are disposed on the central axis and support the stage by connecting the frame and the central area of the stage, and a stage driving structure, which includes driving comb electrodes formed at both long sides of the stage and fixed comb electrodes formed at corresponding sides of the frame, parallel to the first direction.

摘要翻译： 提供了一种光学扫描器及其制造方法。 光学扫描器包括矩形框架，H形台阶，其在垂直于框架内的中心轴线的第一方向的第二方向上线性地驱动，并且包括位于中心轴线的方向上的中心区域和四个延伸的 从平行于中心轴线的中心区域的相对侧延伸的区域，设置在中心区域上并沿着第二方向扫描入射在其表面上的激光束的圆柱形反射镜，扭矩杆设置在 中心轴并且通过连接框架和平台的中心区域来支撑平台，以及台架驱动结构，其包括形成在舞台的两个长边处的驱动梳电极和形成在框架的相应侧的固定梳电极， 平行于第一个方向。

公开(公告)号：US20050117235A1

公开(公告)日：2005-06-02

申请号：US11000004

申请日：2004-12-01

申请人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho

发明人： Young-chul Ko ,  Jin-ho Lee ,  Jin-woo Cho

IPC分类号： B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  G02B26/10 ,  G02B7/182

CPC分类号： G02B26/0833 ,  G02B26/105

摘要： A micro mirror structure having an increased driving angle while being driven in high speed. The micro mirror includes a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section including mobile combs arranged on the adjoining section. A fixed comb is provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without largely increasing rotational inertia moment. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.

摘要翻译： 微镜结构在高速驱动的同时具有增大的驱动角度。 微反射镜包括反射光的可旋转镜部分，用于支撑镜部分的一对弹簧部分，并且当镜部被旋转地驱动时用作镜部分的旋转轴线，用于连接镜部分的椭圆形邻接部分和 一对弹簧部分，以及包括设置在相邻部分上的移动梳状物的驱动部分。 在移动梳的上方和/或下方设置固定梳以对应于移动梳以产生静电力。 根据本发明，通过存在椭圆形邻接部分，可以在不大幅度增加旋转惯性力矩的情况下增加力矩。 因此，可以提供具有增加的驱动角度的高速光学扫描仪，这是高分辨率激光电视所需要的。

公开(公告)号：US20070121188A1

公开(公告)日：2007-05-31

申请号：US11668713

申请日：2007-01-30

申请人： Young-chul KO ,  Jin-ho Lee ,  Jin-woo Cho

发明人： Young-chul KO ,  Jin-ho Lee ,  Jin-woo Cho

IPC分类号： G02B26/08

CPC分类号： G02B26/0833 ,  G02B26/105

摘要： Disclosed is a micro mirror having a structure improved to have an increased driving angle while being driven in high speed. The micro mirror comprises a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section comprising mobile combs arranged on the adjoining section, and a fixed comb provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without increasing rotational inertia moment so largely. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.

摘要翻译： 公开了一种微镜，其具有改进以在高速驱动的同时具有增加的驱动角的结构。 微反射镜包括反射光的可旋转镜部分，用于支撑镜部分的一对弹簧部分，并且当镜部被旋转驱动时用作镜部分的旋转轴线，用于连接镜部分的椭圆形邻接部分和 一对弹簧部分，以及包括设置在相邻部分上的移动梳状部分的驱动部分，以及设置在移动梳状体上方和/或下方的固定梳齿，以对应于移动梳来产生静电力。 根据本发明，通过存在椭圆形相邻部分，可以大大提高力矩而不增加旋转惯性矩。 因此，可以提供具有增加的驱动角度的高速光学扫描仪，这是高分辨率激光电视所需要的。