公开(公告)号：US20070121188A1

公开(公告)日：2007-05-31

申请号：US11668713

申请日：2007-01-30

申请人： Young-chul KO ,  Jin-ho Lee ,  Jin-woo Cho

发明人： Young-chul KO ,  Jin-ho Lee ,  Jin-woo Cho

IPC分类号： G02B26/08

CPC分类号： G02B26/0833 ,  G02B26/105

摘要： Disclosed is a micro mirror having a structure improved to have an increased driving angle while being driven in high speed. The micro mirror comprises a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section comprising mobile combs arranged on the adjoining section, and a fixed comb provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without increasing rotational inertia moment so largely. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.

摘要翻译： 公开了一种微镜，其具有改进以在高速驱动的同时具有增加的驱动角的结构。 微反射镜包括反射光的可旋转镜部分，用于支撑镜部分的一对弹簧部分，并且当镜部被旋转驱动时用作镜部分的旋转轴线，用于连接镜部分的椭圆形邻接部分和 一对弹簧部分，以及包括设置在相邻部分上的移动梳状部分的驱动部分，以及设置在移动梳状体上方和/或下方的固定梳齿，以对应于移动梳来产生静电力。 根据本发明，通过存在椭圆形相邻部分，可以大大提高力矩而不增加旋转惯性矩。 因此，可以提供具有增加的驱动角度的高速光学扫描仪，这是高分辨率激光电视所需要的。

公开(公告)号：US20090080049A1

公开(公告)日：2009-03-26

申请号：US12045722

申请日：2008-03-11

申请人： Young-chul KO ,  Jun-o Kim ,  Jin-woo Cho ,  Hee-moon Jeong ,  Woo-hyek Choi

发明人： Young-chul KO ,  Jun-o Kim ,  Jin-woo Cho ,  Hee-moon Jeong ,  Woo-hyek Choi

IPC分类号： G02B26/08

CPC分类号： G02B26/085 ,  G02B26/101

摘要： A 2-axis driving electromagnetic scanner, having a structure in which a mirror is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer driving unit which is capable of rotating around a first axis; an inner driving unit which is suspended from the outer driving unit so as to rotate around a second axis perpendicular to the first axis; and a stage which is located on an upper surface of the inner driving unit so as to rotate together with the inner driving unit. In the electromagnetic scanner, the stage is connected to the inner driving unit by a link unit protruding from a center of a lower surface of the stage.

摘要翻译： 提供具有将反射镜与驱动单元分离并直接驱动的结构的2轴驱动电磁扫描器。 电磁扫描器包括：能够围绕第一轴线旋转的外部驱动单元; 内部驱动单元，其从所述外部驱动单元悬挂以围绕垂直于所述第一轴线的第二轴线旋转; 以及位于内驱动单元的上表面上以与内驱动单元一起旋转的台。 在电磁扫描器中，通过从台的下表面的中心突出的连杆单元将台连接到内驱动单元。

公开(公告)号：US20080007376A1

公开(公告)日：2008-01-10

申请号：US11711057

申请日：2007-02-27

申请人： Hee-moon Jeong ,  Seok-jin Kang ,  Jin-woo Cho ,  Young-chul KO ,  Hyun-ku Jeong

发明人： Hee-moon Jeong ,  Seok-jin Kang ,  Jin-woo Cho ,  Young-chul KO ,  Hyun-ku Jeong

IPC分类号： H01F7/08 ,  G01R27/26

CPC分类号： G02B26/085 ,  H01F7/066 ,  H01F2007/068

摘要： A micro electro mechanical system (MEMS) device is provided. The MEMS device includes: a stage which operates in a vibration mode; an axle which supports the stage and allows rotation of the stage; and a capacitive sensor which detects rotation of the stage. The capacitive sensor includes: a sensing arm which extends from the stage; driving combs which extend from the sensing arm and rotated together with the stage; fixed combs which are fixedly supported for engagement with the driving combs, the fixed combs including surfaces overlapping opposite surfaces of the driving combs in accordance with the rotation of the driving combs; and a capacitance sensing portion which detects a capacitance change of the driving combs and the fixed combs. Therefore, the MEMS device performs precise scanning by structurally preventing deformation of the stage having a light reflecting surface.

摘要翻译： 提供了微机电系统（MEMS）装置。 MEMS器件包括：以振动模式操作的级; 支撑舞台并允许舞台旋转的轴; 以及检测台的旋转的电容式传感器。 该电容传感器包括：从该台延伸的感测臂; 驱动梳子，其从感测臂延伸并与舞台一起旋转; 固定梳子，其被固定地支撑以与驱动梳状物接合，固定梳根据驱动梳的旋转包括与驱动梳的相对表面重叠的表面; 以及电容感测部，其检测驱动梳和固定梳的电容变化。 因此，MEMS器件通过结构防止具有光反射表面的台的变形来执行精确的扫描。

公开(公告)号：US20080238592A1

公开(公告)日：2008-10-02

申请号：US11862233

申请日：2007-09-27

申请人： Young-chul KO ,  Jin-woo CHO ,  Woo-hyek CHOI ,  Hee-moon JUNG

发明人： Young-chul KO ,  Jin-woo CHO ,  Woo-hyek CHOI ,  Hee-moon JUNG

IPC分类号： H01F7/06 ,  G02B26/08

CPC分类号： G02B26/085 ,  G02B26/101 ,  H01F7/08 ,  H01F7/122 ,  H01F7/14 ,  H01F2007/068 ,  H01F2007/1692 ,  H02K16/04 ,  H02K41/0354 ,  H02K2201/18

摘要： Provided is a two-axis driving electromagnetic actuator that includes a stage that is operative to be actuated about a first axis; an inner frame that that is disposed outside the stage and supports the stage by the first axis; an external frame that is disposed outside the inner frame and supports the inner frame by a second axis which is perpendicular to the first axis; a magnet that provides an electric field between the first axis and the second axis; a first driving coil that is formed on the inner frame and to which a first signal that actuates the stage in a direction of the second axis is applied; and a second driving coil that is formed on the inner frame and to which a second signal that actuates the stage and the inner frame in a direction of the first axis is applied, wherein the first driving coil and the second driving coil are electrically separated from each other.

摘要翻译： 提供了一种双轴驱动电磁致动器，其包括可围绕第一轴线致动的台架; 内框架，其设置在所述台架之外并且通过所述第一轴线支撑所述台架; 外部框架，其设置在所述内框架的外部并且通过垂直于所述第一轴线的第二轴线支撑所述内框架; 磁体，其在所述第一轴线和所述第二轴线之间提供电场; 第一驱动线圈，其形成在所述内框上，并且施加沿所述第二轴的方向致动所述台的第一信号; 以及第二驱动线圈，其形成在所述内框上，并且施加在所述第一轴的方向上致动所述台和所述内框架的第二信号，其中所述第一驱动线圈和所述第二驱动线圈与 彼此。

公开(公告)号：US20100109520A1

公开(公告)日：2010-05-06

申请号：US12508027

申请日：2009-07-23

申请人： Shang-hyeun PARK ,  Min-jong BAE ,  Tae-won JEONG ,  Young-chul KO

发明人： Shang-hyeun PARK ,  Min-jong BAE ,  Tae-won JEONG ,  Young-chul KO

IPC分类号： H01J1/62 ,  H01J9/00

CPC分类号： H05B33/22

摘要： An inorganic electroluminescence (“EL”) device includes a lower electrode; a dielectric layer disposed on the lower electrode; an inorganic emission layer disposed on the dielectric layer; an upper electrode disposed on the inorganic emission layer; a waveguide layer disposed on the upper electrode; and a reflection film partially coating the waveguide layer and including an emission portion through which light is emitted.

摘要翻译： 无机电致发光（“EL”）器件包括下电极; 设置在下电极上的电介质层; 设置在电介质层上的无机发射层; 设置在无机发射层上的上电极; 布置在上电极上的波导层; 以及部分地涂覆波导层并且包括发射光的发射部分的反射膜。

公开(公告)号：US20100060709A1

公开(公告)日：2010-03-11

申请号：US12477938

申请日：2009-06-04

申请人： Young-chul KO ,  Woo-Kyu KIM ,  Shang-Hyeun PARK ,  Jong-Chul CHOI

发明人： Young-chul KO ,  Woo-Kyu KIM ,  Shang-Hyeun PARK ,  Jong-Chul CHOI

IPC分类号： B41J2/435 ,  G01N23/04

CPC分类号： B41J2/451

摘要： Disclosed are a line light source, a line printer head, and an image forming apparatus. The line light source includes a light waveguide unit which guides light emitted from a light emitting layer which is disposed between a bottom electrode and top electrodes, wherein the light waveguide unit is disposed on the top electrodes. Light is emitted through the surface area of light emitting areas defined by overlapping areas of the bottom electrode and the top electrodes. The light waveguide includes a plurality of openings, the sizes of which may be different than the surface area of the light emitting areas. The light emitting amount can be adjusted by adjusting the light emitting surface areas without reducing printing resolution of the image forming apparatus by employing the disclosed line light source as the line printer head.

摘要翻译： 公开了一种线光源，行式打印机头和图像形成装置。 线光源包括：光波导单元，其引导从位于底部电极和顶部电极之间的发光层发出的光，其中，光波导单元设置在顶部电极上。 光通过由底部电极和顶部电极的重叠区域限定的发光区域的表面区域发射。 光波导包括多个开口，其大小可以不同于发光区域的表面积。 可以通过使用所公开的线光源作为线打印机头来调节发光表面面积而不降低成像设备的打印分辨率来调节发光量。

公开(公告)号：US20070287231A1

公开(公告)日：2007-12-13

申请号：US11733791

申请日：2007-04-11

申请人： Seok-whan CHUNG ,  Hyung CHOI ,  Seok-jin KANG ,  Young-chul KO

发明人： Seok-whan CHUNG ,  Hyung CHOI ,  Seok-jin KANG ,  Young-chul KO

IPC分类号： H01L21/84

CPC分类号： B81C1/00166 ,  B81B2201/033 ,  B81B2201/042 ,  G02B26/0841

摘要： A method of etching decoupled comb electrodes by self-alignment is provided The etching method is a self-alignment etching method for forming upper comb electrodes in a first silicon layer of a silicon on insulator (SOI) substrate and lower comb electrodes in a second silicon layer of the SOI substrate. The self-alignment etching method includes forming a first metal mask on the first silicon layer so as to cover portions of the first silicon layer where the upper comb electrodes are to be formed, forming a first photoresist (PR) mask on the first metal mask and portions of the first silicon layer corresponding to the lower comb electrodes, selectively etching the first silicon layer using the first PR mask as an etch barrier layer, selectively etching an insulating layer of the SOI substrate using the first PR mask as an etch barrier layer, selectively etching the second silicon layer of the SOI substrate using the first PR mask as an etch barrier layer, forming a second PR mask on portions of the second silicon layer corresponding to the upper comb electrodes, forming a second metal mask entirely on an exposed bottom surface of the second silicon layer including the second PR mask, removing the first and second PR masks, and etching the first and second silicon layers using the remaining first and second metal masks so as to form the upper comb electrodes and the lower comb electrodes.

摘要翻译： 提供了通过自对准来蚀刻去耦合梳状电极的方法。蚀刻方法是用于在绝缘体上硅（SOI）衬底的第一硅层中形成上梳状电极的自对准蚀刻方法和在第二硅中的下梳状电极 SOI衬底层。 自对准蚀刻方法包括在第一硅层上形成第一金属掩模以覆盖将要形成上梳状电极的第一硅层的部分，在第一金属掩模上形成第一光致抗蚀剂（PR）掩模 并且第一硅层对应于下梳状电极的部分，使用第一PR掩模选择性地蚀刻第一硅层作为蚀刻阻挡层，使用第一PR掩模作为蚀刻阻挡层选择性地蚀刻SOI衬底的绝缘层 使用第一PR掩模作为蚀刻阻挡层选择性地蚀刻SOI衬底的第二硅层，在对应于上梳状电极的第二硅层的部分上形成第二PR掩模，完全在暴露的 第二硅层的底表面包括第二PR掩模，去除第一和第二PR掩模，以及使用rema蚀刻第一和第二硅层 在第一和第二金属掩模上形成上梳状电极和下梳状电极。