公开(公告)号：US08299630B2

公开(公告)日：2012-10-30

申请号：US13146759

申请日：2010-01-26

申请人： Joerg Braeuer ,  Thomas Gessner ,  Lutz Hofmann ,  Joerg Froemel ,  Maik Wiemer ,  Holger Letsch ,  Mario Baum

发明人： Joerg Braeuer ,  Thomas Gessner ,  Lutz Hofmann ,  Joerg Froemel ,  Maik Wiemer ,  Holger Letsch ,  Mario Baum

IPC分类号： H01L23/48 ,  H01L29/40 ,  H01L21/44 ,  H01L21/48

CPC分类号： B81C3/001 ,  B81C2203/019 ,  B81C2203/032

摘要： A microstructure has at least one bonding substrate and a reactive multilayer system. The reactive multilayer system has at least one surface layer of the bonding substrate with vertically oriented nanostructures spaced apart from one another. Regions between the nanostructures are filled with at least one material constituting a reaction partner with respect to the material of the nanostructures. A method for producing at least one bonding substrate and a reactive multilayer system, includes, for forming the reactive multilayer system, at least one surface layer of the bonding substrate is patterned or deposited in patterned fashion with the formation of vertically oriented nanostructures spaced apart from one another, and regions between the nanostructures are filled with at least one material constituting a reaction partner with respect to the material of the nanostructures. A microsystem is formed from two bonding substrates and a construction lying between the bonding substrates, the construction having a reacted reactive layer system. The microsystem is a sensor coated with biomaterial and/or has elements composed of polymeric material and/or at least one magnetic and/or piezoelectric and/or piezoresistive component.

摘要翻译： 微结构具有至少一个键合衬底和反应性多层体系。 反应性多层体系具有至少一个表面层，该表面层具有彼此间隔开的垂直取向的纳米结构的接合基底。 纳米结构之间的区域填充有至少一种相对于纳米结构材料构成反应伴侣的材料。 一种用于制造至少一个接合基材和反应性多层体系的方法，包括用于形成反应性多层体系的方法，所述接合基材的至少一个表面层以图案化方式图案化或沉积，形成垂直取向的纳米结构， 并且纳米结构之间的区域填充有相对于纳米结构的材料构成反应伴侣的至少一种材料。 微系统由两个接合基板和位于接合基板之间的结构形成，该结构具有反应的反应层系统。 微系统是涂覆有生物材料的传感器和/或具有由聚合物材料和/或至少一个磁性和/或压电和/或压阻组件组成的元件。

公开(公告)号：US20110284975A1

公开(公告)日：2011-11-24

申请号：US13146759

申请日：2010-01-26

申请人： Joerg Braeuer ,  Thomas Gessner ,  Lutz Hofmann ,  Joerg Froemel ,  Maik Wiemer ,  Holger Letsch ,  Mario Baum

发明人： Joerg Braeuer ,  Thomas Gessner ,  Lutz Hofmann ,  Joerg Froemel ,  Maik Wiemer ,  Holger Letsch ,  Mario Baum

IPC分类号： H01L29/06 ,  H01L29/82 ,  H01L21/28 ,  H01L29/84 ,  B82Y99/00

CPC分类号： B81C3/001 ,  B81C2203/019 ,  B81C2203/032

摘要： A microstructure has at least one bonding substrate and a reactive multilayer system. The reactive multilayer system has at least one surface layer of the bonding substrate with vertically oriented nanostructures spaced apart from one another. Regions between the nanostructures are filled with at least one material constituting a reaction partner with respect to the material of the nanostructures. A method for producing at least one bonding substrate and a reactive multilayer system, includes, for forming the reactive multilayer system, at least one surface layer of the bonding substrate is patterned or deposited in patterned fashion with the formation of vertically oriented nanostructures spaced apart from one another, and regions between the nanostructures are filled with at least one material constituting a reaction partner with respect to the material of the nanostructures. A device for bonding a microstructure, which has at least one bonding substrate and a reactive multilayer system, to a further structure, which has a bonding substrate. The device has a bonding chamber, which can be opened and closed and evacuated and in which the microstructure and the further structure can be introduced and aligned with one another, and also an activation mechanism, which is coupled to the bonding chamber and by means of which the reactive multilayer system of the microstructure, said reactive multilayer system being formed from reactive nanostructures with—situated therebetween—a material constituting a reaction partner with respect to the material of the nanostructures, can be activated mechanically, electrically, electromagnetically, optically and/or thermally in such a way that a self-propagating, exothermic reaction takes place between the nanostructures and the material constituting a reaction partner with respect to the material of the nanostructures. A microsystem is formed from two bonding substrates and a construction lying between the bonding substrates, the construction having a reacted reactive layer system, wherein the reacted reactive layer system is a reacted structure sequence composed of at least one surface layer—provided on the bonding substrate—with vertically oriented nanostructures spaced apart from one another, and regions filled between the nanostructures with at least one material constituting a reaction partner with respect to the material of the nanostructures. The microsystem is a sensor coated with biomaterial and/or has elements composed of polymeric material and/or at least one magnetic and/or piezoelectric and/or piezoresistive component.