Method for inspecting a wafer
    1.
    发明申请
    Method for inspecting a wafer 审中-公开
    检查晶圆的方法

    公开(公告)号:US20060103838A1

    公开(公告)日:2006-05-18

    申请号:US11254024

    申请日:2005-10-19

    IPC分类号: G01N21/88

    CPC分类号: H01L22/34 G01N21/95607

    摘要: The examination of a wafer (10) has until now been implemented by means of wafer-to-wafer comparison of the entire wafer (10). In order to ensure timely detection of defects, or the development of defects, on a wafer (10) wafer-to-wafer comparison is limited to particular comparison regions (22) selected by the user.

    摘要翻译: 迄今为止,晶片(10)的检查已经通过整个晶片(10)的晶片对晶片比较来实现。 为了确保及时检测缺陷或缺陷的发展,在晶片(10)晶片与晶片之间的比较被限制于由用户选择的特定比较区域(22)。

    Method for inspecting a surface of a wafer with regions of different detection sensitivity
    2.
    发明授权
    Method for inspecting a surface of a wafer with regions of different detection sensitivity 有权
    用不同检测灵敏度检测晶片表面的方法

    公开(公告)号:US08200004B2

    公开(公告)日:2012-06-12

    申请号:US12316117

    申请日:2008-12-09

    CPC分类号: G01N21/9501 G01N21/9503

    摘要: The invention relates to a method for inspecting a surface of a wafer with regions of different detection sensitivity. For this purpose, an image of the selected surface of the wafer is acquired using a detector. At least one region handled with a different detection sensitivity than the rest of the wafer may be defined on the surface of the wafer by means of an input unit. The detection sensitivity set for the regions is a percentage less than the detection sensitivity for the surface of the wafer without the regions with the different detection sensitivity.

    摘要翻译: 本发明涉及用不同检测灵敏度的区域检查晶片表面的方法。 为此,使用检测器获取晶片的选定表面的图像。 可以通过输入单元在晶片的表面上限定以与晶片的其余部分不同的检测灵敏度处理的至少一个区域。 对于区域设置的检测灵敏度小于具有不同检测灵敏度的区域的晶片表面的检测灵敏度的百分比。

    Method for inspecting a surface of a wafer with regions of different detection sensitivity
    3.
    发明申请
    Method for inspecting a surface of a wafer with regions of different detection sensitivity 有权
    用不同检测灵敏度检测晶片表面的方法

    公开(公告)号:US20090161942A1

    公开(公告)日:2009-06-25

    申请号:US12316117

    申请日:2008-12-09

    IPC分类号: G06K9/00

    CPC分类号: G01N21/9501 G01N21/9503

    摘要: The invention relates to a method for inspecting a surface of a wafer with regions of different detection sensitivity. For this purpose, an image of the selected surface of the wafer is acquired using a detector. At least one region handled with a different detection sensitivity than the rest of the wafer may be defined on the surface of the wafer by means of an input unit. The detection sensitivity set for the regions is a percentage less than the detection sensitivity for the surface of the wafer without the regions with the different detection sensitivity.

    摘要翻译: 本发明涉及用不同检测灵敏度的区域检查晶片表面的方法。 为此,使用检测器获取晶片的选定表面的图像。 可以通过输入单元在晶片的表面上限定以与晶片的其余部分不同的检测灵敏度处理的至少一个区域。 对于区域设置的检测灵敏度小于具有不同检测灵敏度的区域的晶片表面的检测灵敏度的百分比。

    Mine roof support structure
    7.
    发明授权
    Mine roof support structure 失效
    矿顶支撑结构

    公开(公告)号:US4293246A

    公开(公告)日:1981-10-06

    申请号:US77478

    申请日:1979-09-20

    IPC分类号: E21D23/00 E21D23/04 E21D15/44

    CPC分类号: E21D23/0034 E21D23/0427

    摘要: A mine roof support structure includes a floor skid, a supporting shield pivotally connected thereto by a pair of rocker arms forming a lemniscate guide, a roof cap pivotally connected at a roof cap joint to the shield, and hydraulic props supporting the roof cap. A hydraulic actuator is pivotally connected at opposite ends to the skid and to one of the arms, and the other of the rocker arms is disposed nearer the coal-face end of the support than the one arm. Such other arm is longitudinally adjustable and is pivotally connected at opposite ends to the skid and to the shield. This other arm is so constructed that its opposite ends may be adjusted relative to one another to enable the cap and the roof cap joint to follow a lemniscate path during settling of the roof and to follow a circular arc during a lowering of the cap toward the skid upon actuation of the hydraulic actuator.

    摘要翻译: 矿山屋顶支撑结构包括地板滑行板,通过一对形成收集引导件的摇臂枢转地连接到其上的支撑屏蔽件,在顶盖接头处枢转连接到屏蔽件的顶盖以及支撑顶盖的液压道具。 液压致动器在相对的端部枢转地连接到滑动件和一个臂上,并且另一个摇臂布置成比一个臂更靠近支撑件的煤面端部。 这样的另一个臂是可纵向调节的,并且在相对的端部枢转地连接到防滑板和防护罩。 该另一个臂被构造成使得其相对的端部可相对于彼此调节,以使盖和屋顶盖接头在屋顶沉降期间遵循一个完整的路径,并且在盖朝向 在液压执行机构的启动时滑行。