公开(公告)号：US07433052B2

公开(公告)日：2008-10-07

申请号：US11175271

申请日：2005-07-07

申请人： Joseph D Tobiason ,  David W Sesko ,  Benjamin K Jones ,  Michelle M Milvich ,  Vidya Venkatachalam

发明人： Joseph D Tobiason ,  David W Sesko ,  Benjamin K Jones ,  Michelle M Milvich ,  Vidya Venkatachalam

IPC分类号： G01B11/02

CPC分类号： G01B9/02032 ,  G01B9/02019 ,  G01B9/02097 ,  G01B11/26

摘要： A method of determining an amount of tilt may include projecting at least two coherent wavefronts toward a target surface, the wavefronts reflecting from the target surface to create an interference fringe pattern on a detector, and transmitting a beam toward the target surface, the transmitted beam reflecting from the target surface to form a beam spot on the detector. A fringe pitch indicative of a distance to the target surface may be determined based on the interference fringe pattern. A displacement on the detector of the beam spot, relative to a nominal location of the beam spot when the target surface is at a nominal angle of incidence relative to the beam, may be determined. The amount of tilt of the target surface relative to the nominal angle of incidence, may be determined based on the displacement of the beam spot and the determined fringe pitch.

摘要翻译： 确定倾斜量的方法可以包括将至少两个相干波前投射到目标表面，波前从目标表面反射以在检测器上产生干涉条纹图案，并将光束传送到目标表面，透射光束 从目标表面反射以在检测器上形成束斑。 可以基于干涉条纹图案来确定表示到目标表面的距离的条纹间距。 可以确定当目标表面相对于光束的入射角相对于光束点的标称位置时，光斑的检测器上的位移。 目标表面相对于标称入射角的倾斜量可以基于束斑的位移和所确定的边缘间距来确定。