公开(公告)号：US20110311180A1

公开(公告)日：2011-12-22

申请号：US13106986

申请日：2011-05-13

申请人： Juejun Hu ,  Nathan A. Carlie ,  Laeticia C. Petit ,  Anuradha M. Agarwal ,  Kathleen A. Richardson ,  Lionel C. Kimerling

发明人： Juejun Hu ,  Nathan A. Carlie ,  Laeticia C. Petit ,  Anuradha M. Agarwal ,  Kathleen A. Richardson ,  Lionel C. Kimerling

IPC分类号： G02B6/12

CPC分类号： G02B6/132

摘要： An integrated optical waveguide includes a substrate, a waveguide under-cladding layer disposed on the substrate, and a waveguide core, having top and sidewall surfaces, disposed on the under-cladding layer. A glassy surface smoothing layer disposed on the waveguide core top surface and sidewall surfaces and has a refractive index, relative to a refractive index of the waveguide core, that enables guided optical transmission through the waveguide core and the glassy surface smoothing layer. In fabrication of the optical waveguide, a waveguide under-cladding layer is formed on a substrate and a waveguide core having sidewall surfaces and a top surface is formed on the under-cladding layer. A liquid suspension comprising particles of a glassy material is applied on the top and sidewall surfaces of the waveguide core. The applied liquid glassy particle suspension is heated to form a glassy surface smoothing layer on the waveguide core top surface and sidewall surfaces.

摘要翻译： 集成光波导包括衬底，设置在衬底上的波导下敷层，以及设置在下敷层上的具有顶壁和侧壁表面的波导芯。 布置在波导芯顶表面和侧壁表面上的玻璃表面平滑层，并且具有相对于波导芯的折射率的折射率，其能够引导光透过波导芯和玻璃表面平滑层。 在光波导的制造中，在基板上形成波导下敷层，在下敷层上形成具有侧壁面的波导芯和顶面。 包含玻璃状材料颗粒的液体悬浮液被施加在波导芯的顶壁和侧壁表面上。 将所施加的液体玻璃状颗粒悬浮液加热以在波导芯顶表面和侧壁表面上形成玻璃状表面平滑层。